Systems and methods to manipulate stacks of silicon wafers and rings are described. In one aspect, a robotic actuator includes a robotic end effector that further a first surface having multiple attached wafer suction cups arranged to collectively grasp a silicon wafer. The robotic end effector also includes a second surface that further includes multiple attached ring suction cups arranged to collectively grasp a ring. The second surface also includes a bulk grabber positionable to grasp a collective stack of rings. The robotic actuator also includes an axial actuator configured to rotate the robotic end effector about a flip axis, such that either the first surface or the second surface faces vertically upwards.

A robot hand includes grip portions for gripping an article, grip drive mechanisms for moving the grip portions, and a control device for controlling the drive of the grip drive mechanisms. Then, the control device controls the drive of the grip drive mechanisms to start gripping operation with a first force for a force of gripping an article by the grip portions, and then switches the force of gripping an article by the grip portions to a second force.

An object processing system is disclosed that includes a plurality of track sections, and a plurality of remotely actuatable carriers for controlled movement along at least portions of the plurality of track sections, each of the actuatable carriers being instructed at any time to move a limited number of track section only.

An automated carrier system is disclosed for moving objects to be processed. The automated carrier system includes a base structure of a carrier on which an object may be supported, and at least two wheels mounted to at least two motors to provide at least two wheel assemblies, the at least two wheel assemblies being pivotally supported on the base structure for pivoting movement from a first position to a second position to effect a change in direction of movement of the carrier.

An automated carrier system is disclosed for moving objects to be processed. The automated carrier system includes a base structure of a carrier on which an object may be supported, and at least two wheels mounted to at least two motors to provide at least two wheel assemblies, the at least two wheel assemblies being pivotally supported on the base structure for pivoting movement from a first position to a second position to effect a change in direction of movement of the carrier.

Disclosed are systems and methods for aseptically filling pharmaceutical containers with a pharmaceutical substance and then lyophilizing it. In one general aspect, the system and method can employ a lyophilizer loader subsystem having an interior chamber in communication with an interior chamber of a lyophilizer subsystem via a portal with a sealable door, with the collective interior being aseptically sealable. An articulated robotic arm can be employed to batch transfer to the lyophilizer subsystem container nests bearing the pharmaceutical containers. In one embodiment, the nests may be transferred serially to the loader subsystem, with the articulated robotic arm being configured to transfer the nests of containers in batches to the lyophilizer subsystem. The articulated robotic arm can also be configured to be used to move batches of nests within the lyophilizer subsystem. One implementation includes two articulated arms and a joint rotary wrist driven by two rotary shoulders.

An equipment front end module may include an equipment front end module body forming an equipment front end module chamber. The equipment front end module body may include plurality of walls. One or more load locks or process chambers may be coupled to one or more first walls. One or more load ports may be provided in one or more second walls, wherein each of the one or more load ports are configured to dock a substrate carrier. A plurality of alignment pedestals may be housed within the equipment front end module chamber. A load/unload robot may be at least partially housed within the equipment front end module chamber, wherein the load/unload robot may include a plurality of blades. Other apparatus and methods are disclosed.

An object processing system is disclosed that includes a plurality of track sections, and a plurality of remotely actuatable carriers for controlled movement along at least portions of the plurality of track sections, wherein each of the remotely controllable carriers is adapted to support and transport an object processing bin.

An object processing system is disclosed that includes a plurality of track sections, and a plurality of remotely actuatable carriers for controlled movement along at least portions of the plurality of track sections, wherein each of the remotely controllable carriers is adapted to support and transport an object processing bin.

The invention relates to a manipulator (10) for pivoting an object of manipulation, the manipulator (10) having a frame comprising a pivot base which can be pivoted in a horizontal plane about a vertical pivot axis (11) relative to the frame by means of a drive (26), the pivot base having a boom (20) comprising a load carrier (15) which is disposed at a free end of the boom (20) and serves to be connected to the object of manipulation, the load carrier (15) having a pivot device for pivoting the object of manipulation in the horizontal plane, wherein, in order to produce a pivoting four-bar linkage formed in the horizontal plane and comprising the boom (20), a control bar (24) extending from the frame to the pivot device is provided, one end of the control bar (24) being articulated to the pivot device of the load carrier (15) and the other end being articulated to the frame via a control gear mechanism in such a manner that in the event of a base pivoting movement of the pivot base, a load carrier pivoting movement superimposed on the base pivoting movement is effected via the control gear mechanism and the control bar (24).