Exemplary substrate processing systems may include a transfer region housing defining an internal volume. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft concentric with and counter-rotatable to the first shaft. The transfer apparatus may include a first end effector coupled with the first shaft. The first end effector may include a plurality of first arms. The transfer apparatus may also include a second end effector coupled with the second shaft. The second end effector may include a plurality of second arms having a number of second arms equal to the number of first arms of the first end effector.

Exemplary substrate processing systems may include a transfer region housing defining a transfer region, and including substrate supports and a transfer apparatus. The transfer apparatus may include a central hub having a housing, and including a first shaft and a second shaft. The housing may be coupled with the second shaft, and may define an internal housing volume. The transfer apparatus may include a plurality of arms equal to a number of substrate supports of the plurality of substrate supports. Each arm of the plurality of arms may be coupled about an exterior of the housing. The transfer apparatus may include a plurality of arm hubs disposed within the internal housing volume. Each arm hub of the plurality of arm hubs may be coupled with an arm of the plurality of arms through the housing. The arm hubs may be coupled with the first shaft of the central hub.

A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.

A rotating cam device for a pick-up head with pick-up members arranged side by side and at a variable distance. The device extends along a horizontal axis an has a first cam and at least a second cam, which extend around the horizontal axis, are suitable to be engaged by tappet elements carried by a first and a second pick-up member, respectively, and at least partly have a sloped or spiral shape for causing a translation of the tappet elements parallel to the horizontal axis in response to a rotation of the first and second cams about the horizontal axis; the second cam is movable in respect to the first cam along the horizontal axis, at least when the device is installed in the pick-up head and rotates around the horizontal axis.

Providing an article discharge system that can be made compact. The article discharge system pulls out some articles from an article group and discharges them. The article discharge system includes a placement unit in which the article group is placed, plural grippers 30, a movable member 20, a robot 10 that moves the movable member, weight acquisition units 40, and a control unit. The plural grippers grip, with gripping member 32, the articles. The plural grippers are attached to the movable member. The weight acquisition units acquire weight values of the articles that each of the grippers grips. The control unit moves the movable member, brings the plural grippers closer to the placement unit, causes the plural grippers to grip some of the articles of the article group placed in the placement unit, and, based on the result of a combination calculation using the weight values of the articles that each of the grippers grips and which the weight acquisition units have acquired, causes predetermined grippers among the plural grippers to release the articles and thereby discharge the articles.

A system for grasping and retaining dishware during a cleaning cycle. The system includes a grasping element and a receiving surface substantially adjacent to the grasping element. The grasping element grasps the dishware, and the receiving surface receives and retains the dishware during at least one stage of a cleaning cycle. The receiving surface rotates about an axis to convey the dishware to at least two unique locations. A corresponding method is also described herein.

A main mover and sub mover are made to run while changing a relative distance of the sub mover with respect to the main mover to change contact positions of cams and cam followers based on a holding position of a sheet member detected by a position detection device to thereby change a position in a horizontal plane of a holder and correct a holding position of the sheet member held at the holder to a preset reference position.

An apparatus for grouped take-up and feeding of a container-group of containers to a cyclical processing machine having a cyclical take-up device for taking up the group of containers includes an intake, a feed, and a transfer apparatus arranged in a transfer region between the intake and the take-up device. The intake forms a closed conveyor section that comprises a linear section, a conveyor, and carrying-and-holding elements that convey containers in a continuous container stream along the conveyor section. The feed uses mechanical propulsion to convey suspended containers to individually transfer the suspended containers to the carrying-and-holding elements. The transfer apparatus has rotatable grippers for taking up a container group from the container stream and after having taken up the group of containers, feeding the group of containers to the cyclical take-up device.

A tray sealing machine comprises a gripper device including first and second tray grippers that operate together to take up trays provided by a feed unit and transport them to a sealing station that is downstream in a production direction. A speed of the first and second tray grippers in the production direction when respectively performing, a closing motion from a respective initial position toward a respective closing position can be accelerated such that the speed of the first and second tray grippers in the production direction relative to a belt speed of the feed unit during a predetermined first time interval is slower than the belt speed, and during a subsequent predetermined second time interval until the respective closing position has been reached is greater than the belt speed, so that gripper fingers on the first and second tray grippers immerse into respective position windows located between the trays.

An equipment front end module may include an equipment front end module body forming an equipment front end module chamber. The equipment front end module body may include plurality of walls. One or more load locks or process chambers may be coupled to one or more first walls. One or more load ports may be provided in one or more second walls, wherein each of the one or more load ports are configured to dock a substrate carrier. A plurality of alignment pedestals may be housed within the equipment front end module chamber. A load/unload robot may be at least partially housed within the equipment front end module chamber, wherein the load/unload robot may include a plurality of blades. Other apparatus and methods are disclosed.