A substrate holding device includes a base body that has a flat plate-like shape and that includes gas passages that open in an upper surface of the base body, and a plurality of protrusions that protrude from the upper surface of the base body. At least an upper part of each of the protrusions has a conical frustum shape having a base angle of 70 or more and 85 or less.

A carrying method of carrying a substrate with a substrate holder, including: holding a part of the substrate located above the substrate holder using holding pads; controlling and driving downward the holding pads holding the substrate so that the substrate is supported on the support surface of the substrate holder, when releasing the hold of an other part of the substrate by a substrate carry-in hand that holds the other part of the substrate located above the substrate holder. Accordingly, the substrate carriage to the substrate holder can be swiftly performed.

Provided is a substrate holding device that inhibits drop in holding accuracy of a substrate. A Bernoulli chucking pad suctions and holds a front surface or a back surface of a substrate S. A position determiner 54 is capable of pushing the substrate S in contact with a side surface 82 of the substrate S, and positioning the suctioned substrate S. A pin 66 enables the position determiner 54 to come in contact with the side surface 82 of the substrate S. The pin 66 brings the position determiner 54 into contact with the side surface 82 of the substrate S, and the position determiner 54 thereby positions the substrate S.

A workpiece transfer apparatus includes a belt conveyor, a rack, a lift mechanism, a removal mechanism, and a controller. The belt conveyor includes a belt having a transfer surface and is configured to move the belt in a transfer direction. The rack includes two opposing side panels and pairs of support grooves that support two ends of each of workpieces. The controller controls the lift mechanism and the removal mechanism to lift or lower the rack so that whenever one of the workpieces is removed from the rack with the removal mechanism, another one of the workpieces stored in the rack is moved to immediately above the transfer surface.

The inventive concept provides an apparatus for supporting a substrate. An apparatus for treating a substrate includes a process chamber that performs a predetermined process on the substrate and a reversing unit that reverses the substrate. The reverse unit includes a grip unit that grips the substrate and a drive unit that rotates the grip unit to reverse the substrate gripped by the grip unit. The grip unit includes a first body that supports one of an upper surface and a lower surface of the substrate and a second body that supports the other surface of the substrate. Each of the first body and the second body includes a support protrusion that is brought into contact with the substrate when the grip unit grips the substrate.

The pressure balancing device comprises a housing, a deformation medium accommodated in the housing and capable of deforming under compression, and a sealing member movably connected with the housing and capable of deforming under pressure. When part of the deformation medium is compressed by the sealing member, the deformation medium deforms so that a part, not compressed, of the deformation medium compresses a corresponding part of the sealing member to make it protrude outwards. The pressure balancing device is simple in structure, easy to assemble and convenient to operate, and raw material cost and processing cost are saved a lot.

The invention relates to a device and to a method for safely and quickly transferring new glass sheets from the production line to a transport vehicle, having the following features; a) a glass-sheet roller conveyor (8) having a glass-rack gripping and stacking device (7) for receiving glass sheets (9) from a production line, b) two parallel running rails (12) extending centrically at a right angle toward the glass-sheet roller conveyor (8), an underfloor energy supply rail (24) being arranged in the region between the running rails (12), c) at least one glass-rack carriage (3), which moves on the running rails (12) and which has at least one glass rack (4, 6) lying on said glass-rack carriage, a glass rack (4, 6) being able to be loaded with obliquely positioned glass sheets (9) and the glass racks (4, 6) being fixed in the oblique position by means of a pivoting device (14), and d) a rotary device (2) arranged in the course of the running rails for rotating a glass-rack carriage (3) by 180 degrees for loading one glass-rack carriage (3) at a time.

The pressure balancing device comprises a housing, a deformation medium accommodated in the housing and capable of deforming under compression, and a sealing member movably connected with the housing and capable of deforming under pressure. When part of the deformation medium is compressed by the sealing member, the deformation medium deforms so that a part, not compressed, of the deformation medium compresses a corresponding part of the sealing member to make it protrude outwards. The pressure balancing device is simple in structure, easy to assemble and convenient to operate, and raw material cost and processing cost are saved a lot.

An insulating glass unit (IGU) assembly line comprising a registration station capable of interleaving double and triple pane IGUs in accordance with an IOU production schedule. Visual indicators or prompts instruct operators at the assembly line in configuring a sequence of IGUs. Triple pane IGUs are assembled with minimal contamination of a center glass lite. A non-contact Bernoulli pad is used to lift a glass lite off from a horizontal or vertical support that conveys it from a glass washer to the registration station. Each of multiple pads has a capacity to lift approximately seven to ten pounds. Use of multiple pads per glass sheet or lite allows lites having dimensions up to 70 by 100 inches (assuming glass thickness of one quarter inch) to be assembled.

Swirl flow-forming body includes main body, first end face that is formed at main body and faces a member to which suction is applied, hole that opens on first end face, jetting port that is formed on inner periphery of main body, inner periphery facing hole, and fluid passage that allows fluid to be discharged into hole via jetting port so as to form a swirl flow that generates negative pressure for applying suction to the member. Inner periphery is formed so as to guide fluid discharged via jetting port, in a direction away from the member, to be discharged from hole.