A processing fixture can be employed for processing a glass cover plate and include: a fixture body, a first sensing component, a roller component, and a control module connected with the first sensing component. The fixture body is made from flexible materials and provided with a positioning groove matched with shape of an outer surface of the glass cover plate. The first sensing component is configured to detect current dimension parameter of the glass cover plate and/or an attaching layer attached to the glass cover plate in the positioning groove, and transmit the detected current dimension parameter to the control module. The control module is configured to control cooperation of the roller component and the fixture body according to the current dimension parameter, so as to correct the current dimension parameter of the glass cover plate or the attaching layer as a target dimension parameter.

A suspended transport vehicle travels along a track supported by a ceiling and transfers an article to a shelf of a rack installed on a floor, the suspended transport vehicle has a driving part, a first traveling part and a second traveling part, a ceiling-side member that is suspended downwards from the first traveling part and the second traveling part and has a transferring part that transfers the article to the shelf of the rack, a floor-side member that is provided so as to be capable of relative movement with respect to the ceiling-side member and has travel rollers being contacting parts in contact with a first guide part installed on the floor, and a distance sensor that detects a relative distance between the ceiling-side member and the floor-side member.

A device for supporting a sheet of glass, in a contact band between the edge and up to 200 mm from the edge of the glass, includes first and second supports that each include a chassis and a support system for supporting the glass connected to the chassis, the support system of each support including a surface for supporting the glass including a fibrous material able to contact the glass in the contact band at a temperature between 400 and 600° C., the two supports being movable in a transfer vertical relative movement enabling the support surface of one to pass over or under the support surface of the other in order to transfer the glass from one support to the other, the support system of the first support including a passage to allow to pass an arm connected to the second support during the transfer vertical relative movement.

The present invention provides a technique to enable sufficient space saving in a transit-type vacuum processing device. The vacuum processing device 1 of the present invention has: a vacuum chamber 2 where a single vacuum ambience is formed; first and second processing regions 4 and 5 that are provided in the vacuum chamber 2 and have a processing source that performs processing on a planar process surface of a substrate 10; and a conveyance drive member 33 that forms a conveyance path for conveying the substrate 10 so as to pass through the first and second processing regions 4 and 5. The conveyance path is formed as a single annular path when the conveyance path is projected onto a plane (vertical plane) containing: a normal line of an arbitrary point on a process surface of the substrate 10 conveyed through the conveyance path, and a trajectory line drawn by the arbitrary point on the process surface of the substrate 10 when the substrate 10 passes straight through the first and second processing regions 4 and 5.

Swirl flow-forming body includes main body, first end face that is formed at main body and faces a member to which suction is applied, hole that opens on first end face, jetting port that is formed on inner periphery of main body, inner periphery facing hole, and fluid passage that allows fluid to be discharged into hole via jetting port so as to form a swirl flow that generates negative pressure for applying suction to the member. Inner periphery is formed so as to guide fluid discharged via jetting port, in a direction away from the member, to be discharged from hole.

A fuel cell separator conveying device that ensures reducing dirt adhesion on a sealing surface of a stacked fuel cell separator using a protection sheet and reducing the protection sheet being left adhered when the fuel cell separator is conveyed is provided. The fuel cell separator conveying device that lifts up and conveys the fuel cell separator placed on the protection sheet includes a grasping portion that grasps the fuel cell separator by a suction force, a moving unit that moves the grasping portion in a lift-up direction of the fuel cell separator, and an air blowing portion that applies a downward force in an opposite direction of the lift-up direction of the fuel cell separator to the protection sheet through an opening of the fuel cell separator when the moving unit moves the grasping portion.

The invention provides systems and methods for robotically stacking sheets. The systems and methods involve a robot arm and a conveyor line. The robot arm has attached thereto a suction frame. In some embodiments, the systems and methods involve first and second robot arms. In such embodiments, the system and method facilitate and involve a sequentially alternating unloading operation such that the system has a first position in which the first robot arm is elevated and has the first suction frame loaded with one or more sheets while the second robot arm is lowered and has the second suction frame unloaded and the system has a second position in which the second robot arm is elevated and has the second suction frame loaded with one or more sheets while the first robot arm is lowered and has the first suction frame unloaded.

The disclosed system for loading and unloading the substrate includes: a substrate rotation apparatus having a first rotation position and a second rotation position with a difference in rotation angle of 90 degrees, wherein the substrate rotation apparatus includes two layers of sucker assemblies, each of which includes a plate body, a plurality of support suction tubes arranged on the plate body, and first suckers connected with tops of respective support suction tubes respectively, and there are gaps, for inserting the substrate therein, between respective first suckers of a lower layer of sucker assembly, and a plate body of an upper layer of sucker assembly; and a mechanical hand including a plurality of mechanical fingers capable of holding two halves of the substrate, both of which are arranged in a length direction of the mechanical fingers, and joined together into an entire substrate.

A distorted substrate is positioned in a predetermined position and corrected, thereby improving the substrate transfer efficiency. A transport unit capable of transporting and positioning a substrate includes a transport mechanism for transporting the substrate to an unloading position, and a positioning mechanism for positioning the substrate in the unloading position. The positioning mechanism includes a regulating member including at least two pairs of regulating portions capable of abutting against the opposing end faces of the substrate, an abutment moving mechanism for moving one regulating portion toward the other regulating portion in each of the at least two pairs of regulating portions, and a regulation moving mechanism capable of moving the regulating member in a direction in which the substrate is pressed.

Disclosed are a substrate alignment apparatus, a substrate processing apparatus, and a substrate processing method using the substrate alignment apparatus. The substrate alignment apparatus and the substrate processing apparatus include a support plate and a plurality of guide units coupled to the support plate to align a position of the substrate. Each of the guide units includes an alignment pin for aligning the substrate in place and a stationary body having a support surface for supporting an edge region of the substrate aligned, the stationary part being fixedly coupled to the support plate. The alignment pin is rotatable about a central axis of the alignment pin relative to the support surface of the stationary part, thereby rapidly aligning the substrate and thus preventing the substrate transferred between a plurality of process chambers by a transfer robot from being separated or having a negative influence on other apparatuses.