The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.

Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the loading device and processing apparatus, a cassette support for holding at least one substrate cassette container, and cassette support purge ports with purge port nozzle locations disposed on the cassette support, each nozzle location being configured so that a nozzle at the nozzle location couples to at least one purge port of the substrate cassette container, wherein each nozzle location defines an interchangeable purge port nozzle interface so that different interchangeable purge port nozzles are removably mounted to respective nozzle interfaces of the nozzle locations that correspond to the different nozzle configurations of the interchangeable purge port nozzle modules, in conformance with and effecting coupling to different ports of different substrate cassette containers having different purge port characteristics.

A method is provided for measuring optical characteristics of a glass sheet as the glass sheet is conveyed in a system for fabricating glass sheets including one or more processing stations and one or more conveyors for conveying the glass sheet during processing. The method comprises providing a background screen including contrasting elements arranged in a pre-defined pattern and a camera for acquiring an image of the background screen; acquiring data associated with a shape of a glass sheet travelling on a conveyor upstream from the background screen; removing the glass sheet from the conveyor; and positioning the glass sheet between the camera and the screen and thereafter acquiring an image of the background screen; re-positioning the glass sheet for continued movement of the glass sheet on the conveyor; and performing one or more processing operations using the acquired image data to analyze the optical characteristics of the glass sheet.

A conveying device includes a flat plate member including a through-hole and a first conveying head that sucks a conveyance object via the through-hole in a state of holding the flat plate member and conveys the flat plate member and the conveyance object to an accommodation case. Moreover, the flat plate member has a shape that prevents an end of the conveyance object from abutting an inner side surface of the accommodation case during placement into the accommodation case.

A fuel cell separator conveying device that ensures reducing dirt adhesion on a sealing surface of a stacked fuel cell separator using a protection sheet and reducing the protection sheet being left adhered when the fuel cell separator is conveyed is provided. The fuel cell separator conveying device that lifts up and conveys the fuel cell separator placed on the protection sheet includes a grasping portion that grasps the fuel cell separator by a suction force, a moving unit that moves the grasping portion in a lift-up direction of the fuel cell separator, and an air blowing portion that applies a downward force in an opposite direction of the lift-up direction of the fuel cell separator to the protection sheet through an opening of the fuel cell separator when the moving unit moves the grasping portion.

The invention provides systems and methods for robotically stacking sheets. The systems and methods involve a robot arm and a conveyor line. The robot arm has attached thereto a suction frame. In some embodiments, the systems and methods involve first and second robot arms. In such embodiments, the system and method facilitate and involve a sequentially alternating unloading operation such that the system has a first position in which the first robot arm is elevated and has the first suction frame loaded with one or more sheets while the second robot arm is lowered and has the second suction frame unloaded and the system has a second position in which the second robot arm is elevated and has the second suction frame loaded with one or more sheets while the first robot arm is lowered and has the first suction frame unloaded.

Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

Manual and automated racking systems and associated methods for loading/unloading glass panels (e.g., insulating glass units (IGU), laminated glass units, glass composites, monolithic glass, and the like) onto/from a transportable rack, and a rack for use with the manual and automated racking systems.

The disclosed system for loading and unloading the substrate includes: a substrate rotation apparatus having a first rotation position and a second rotation position with a difference in rotation angle of 90 degrees, wherein the substrate rotation apparatus includes two layers of sucker assemblies, each of which includes a plate body, a plurality of support suction tubes arranged on the plate body, and first suckers connected with tops of respective support suction tubes respectively, and there are gaps, for inserting the substrate therein, between respective first suckers of a lower layer of sucker assembly, and a plate body of an upper layer of sucker assembly; and a mechanical hand including a plurality of mechanical fingers capable of holding two halves of the substrate, both of which are arranged in a length direction of the mechanical fingers, and joined together into an entire substrate.

A fixed reference edge system that guides a glass slide from a slot of a slide rack onto a scanning stage and guides the glass slide from the scanning stage into the slot of the slide rack. In an embodiment, the fixed reference edge has a first side that is parallel to a side of the slot of the slide rack. The system comprises an assembly that includes a push bar configured to push the slide from the slot onto the scanning stage, and a pull bar configured to pull the slide from the scanning stage into the slot of the slide rack. When the slide is pulled into the slide rack, the long edge of the slide is pressed against the first side of the fixed reference edge to maintain a parallel orientation between the slide and the slot of the slide rack.