Embodiments of the present disclosure provide for apparatus used to detect clogs in a fluid delivery system during CMP processes and methods of detecting clogs in a fluid delivery system during CMP processes. In particular, embodiments herein provide a flow splitter manifold configured to enable monitoring of the pressure of the polishing fluid disposed therein. Monitoring the fluid pressure in the flow splitter manifold enables the detection of clogs in the delivery lines and/or dispense nozzles that inhibit and/or prevent the flow of polishing fluid therethrough or therefrom.

A handheld fluid meter includes circuitry configured to invert the orientation of a visual output provided by a display of the handheld fluid meter and to modify the functionality of buttons that control scrolling on the display. The control circuitry inverts the orientation of the visual output based on a command provided to the control circuitry by a user or by a position sensor.

A handheld fluid meter includes circuitry configured to invert the orientation of a visual output provided by a display of the handheld fluid meter and to modify the functionality of buttons that control scrolling on the display. The control circuitry inverts the orientation of the visual output based on a command provided to the control circuitry by a user or by a position sensor.

A nozzle for dispensing fluid includes a nozzle stem that controls the flow of fluid out of a dispensing end of the nozzle. The nozzle stem includes an overmolded stem tip on a reduced diameter portion of the nozzle stem. The overmolded stem tip is formed from a compliant material and includes a sealing portion and a tip cone extending from the sealing portion.

A nozzle for dispensing fluid includes a nozzle stem that controls the flow of fluid out of a dispensing end of the nozzle. The nozzle stem includes an overmolded stem tip on a reduced diameter portion of the nozzle stem. The overmolded stem tip is formed from a compliant material and includes a sealing portion and a tip cone extending from the sealing portion.

A fuel dispenser is provided with a nozzle drying function that prevents the refreezing of melted ice buildup upon subsequent uses of the nozzle. The fuel dispenser comprises a housing including a holster. A fuel dispensing nozzle is configured to mate with a holster. A port is configured to direct air into the holster and onto the nozzle. A controller is configured to control flow of the air through the port. The port may be attached to a blower located inside or outside of the dispenser using tubing. Alternatively, the port may be attached to a compressed air assembly. The compressed air assembly may include a pressure regulator configured to control the amount of air produced. A heater may heat the air flowing to the port. A pressure cap including a plurality of openings may be configured to seal the nozzle when the nozzle is mated with the holster.

A fuel dispenser is provided with a nozzle drying function that prevents the refreezing of melted ice buildup upon subsequent uses of the nozzle. The fuel dispenser comprises a housing including a holster. A fuel dispensing nozzle is configured to mate with a holster. A port is configured to direct air into the holster and onto the nozzle. A controller is configured to control flow of the air through the port. The port may be attached to a blower located inside or outside of the dispenser using tubing. Alternatively, the port may be attached to a compressed air assembly. The compressed air assembly may include a pressure regulator configured to control the amount of air produced. A heater may heat the air flowing to the port. A pressure cap including a plurality of openings may be configured to seal the nozzle when the nozzle is mated with the holster.

A system, methods, and apparatus for preventing receptacle overfilling are presented. The system can include a sensor member configured to couple with a receptacle and sense a material level within the receptacle, such as via a sight glass of the receptacle. The system can include a controller in operable communication with the sensor member and configured to instantiate the shutoff of material flow from a material dispensing system if a particular material level is detected by the sensor member. The system can include an intermediate member configured to relay communications between the sensor member and the controller. The intermediate member can be coupled to a fluid line and can further act as a holster for the sensor member, such as by facilitating the coupling of the sensor member to the intermediate member and/or the fluid line.

A system, methods, and apparatus for preventing receptacle overfilling are presented. The system can include a sensor member configured to couple with a receptacle and sense a material level within the receptacle, such as via a sight glass of the receptacle. The system can include a controller in operable communication with the sensor member and configured to instantiate the shutoff of material flow from a material dispensing system if a particular material level is detected by the sensor member. The system can include an intermediate member configured to relay communications between the sensor member and the controller. The intermediate member can be coupled to a fluid line and can further act as a holster for the sensor member, such as by facilitating the coupling of the sensor member to the intermediate member and/or the fluid line.

A fluid dispenser, includes: a fluid dispensation pipe, for receiving a fluid and controlling a dispensation the fluid; a MEMS sensor, for sensing a movement of the fluid dispenser, wherein when the movement is determined to be in an abnormal status, the MEMS sensor generates an alarm signal; and a dispensation stopper, for stopping the dispensation of the fluid according to the alarm signal.