A micromechanical component for a pressure sensor device, including a diaphragm that is stretched on a substrate and that is warpable via a pressure difference between a first side of the substrate and a second side of the substrate, and a rocker structure that is connected to the diaphragm in such a way that the rocker structure is movable about a first rotational axis via warping of the diaphragm. The rocker structure is connected to the diaphragm via a lever structure in such a way that the warping of the diaphragm triggers a rotational movement of the lever structure about a second rotational axis oriented in parallel to the first rotational axis and spaced apart from same, and the rotational movement of the lever structure about the second rotational axis triggers a further rotational movement of the rocker structure about the first rotational axis.

Examples are disclosed that relate to scanning mirror systems for display devices. One example provides a display device comprising a light source, a support structure, and a scanning mirror system comprising a mirror, a first anchor located at a first lateral side of the scanning mirror system, a second anchor located at a second lateral side of the scanning mirror system, and a flexure. The flexure comprises a first portion extending from the first anchor toward a first longitudinal end and turning to meet a first end of the mirror, and a second portion extending from the second anchor toward a second longitudinal end and turning to meet to a second end of the mirror opposite the first end. The scanning mirror system further comprises an actuator system configured to actuate the flexure to thereby vary a scan angle of the mirror.

A method of post-processing an actuator element is presented. The method begins by receiving a fabricated actuator element including a metallic layer contacting a substrate, sacrificial layer proximate the metallic layer, and a first dielectric layer on the sacrificial layer. The metallic layer has an end proximal to and contacting at least part of the substrate and a distal end extending over the first dielectric layer. A second dielectric is deposited on a portion of the metallic layer at the distal end. And, the sacrificial layer is removed.

A micromechanical micromirror array including a frame including a cutout, a micromirror device suspended on the frame in the area of the cutout in a first plane, a first pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a first spring device, a second pivoting vane device suspended on the frame protruding into the area of the cutout, coupled to the micromirror device via a second spring device, a first drive device for deflecting the first pivoting vane device along a first axis, perpendicular to the first plane, and a second drive device for the antiphase deflection of the second pivoting vane device along the first axis.

Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

An actuator element of a MEMS device on a substrate is provided to create large, out-of-plane deflection. The actuator element includes a metallic layer having a first portion contacting the substrate and a second portion having an end proximal to the first portion. A distal end is cantilevered over the substrate. A first insulating layer contacts the metallic layer on a bottom contacting surface of the second cantilevered portion from the proximal to the distal end. A second insulating layer contacts the metallic layer on a portion of a top contacting surface at the distal end. The second portion of the metallic layer is prestressed. A coefficient of thermal expansion of the first and second insulating layers is different than a coefficient of thermal expansion of the metallic layer. And, a Young's modulus of the first and second insulating layer is different than a Young's modulus of the metallic layer.

An actuator includes an arm starting end having a piezoelectric element, a first end of the arm starting end connected to an inner side of a fixed frame the arm starting end extending in a straight line, along a Y-axis direction through a gap between the fixed frame and a mirror surface, from the first end to beyond a middle point of an outer side of the mirror surface; an arm terminating end including a first end connected to the middle point of the outer side of the mirror surface, the arm terminating end extending parallel to the arm starting end; and an arm relay that connects a second end of the arm starting end to a second end of the arm terminating end, the arm relay being formed in a zigzag.

Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

An actuator element of a MEMS device on a substrate able to create large, out-of-plane deflection includes two separated metallic layers contacting the substrate. The second metallic layer has a first portion contacting the substrate and a second portion having cantilevered over the substrate and first metallic layer. A first insulating layer contacts the cantilevered metallic layer on a bottom contacting surface and a second insulating layer contacting the cantilevered metallic layer on a portion of a top contacting surface. The second, cantilevered portion of the metallic layer is prestressed causing the distal end to deform away from the substrate. Applying a voltage potential between the first and second metallic layers creates an electrostatic field drawing the distal end toward the substrate.

A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.