A micromechanical mirror includes a mobile mass carrying a mirror element and provided in a body including semiconductor material. A driving structure is coupled to the mobile mass to cause a scanning movement thereof. The driving structure is configured to generate a combination of a two or more sinusoidal resonant modes in the micromechanical mirror at respective resonant frequencies. This combination approximates a scanning pattern of the mobile mass defined by a linear function which may, in particular, be a triangular shaped function.

A mechanical resonator includes a spring-mass system, wherein the spring-mass system comprises a phase-change material. The mechanical resonator typically comprises an electrical circuit portion, coupled to the phase-change material to alter a phase configuration within the phase-change material. Methods of operation are also disclosed.

A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.

A piezoelectric mirror component including a mirror element, a piezoelectric drive ring which surrounds the mirror element and is connected to the mirror element by way of at least one first torsion spring element, and a frame element connected to the drive ring via at least one second torsion spring element is specified, wherein the drive ring has a first diameter in a first direction and a second diameter in a second direction perpendicular to the first direction, and the first diameter is greater than the second diameter. A method for operating the piezoelectric mirror component and a projection apparatus are also specified.

An actuator device includes a support portion; a first movable portion; a second movable portion; a first connection portion that connects the first and second movable portions such that the first movable portion is swingable around a first axis; a second connection portion that connects the second movable portion and the support portion such that the first movable portion is swingable around the first axis. Two natural angular frequencies .sub.1 and .sub.2 (where .sub.1<.sub.2) for vibration of the first and second movable portions around the first axis satisfy one of the following equation (1) and equation (2) and do not satisfy the other, $\begin{array}{cc}\left[\mathrm{Equation}1\right]& \\ 0<1-{\left(\frac{{}_1}{{}_{\mathrm{ii}}}\right)}^{2}0.2& \left(1\right)\end{array}$$\begin{array}{cc}\left[\mathrm{Equation}2\right]& \\ 0<{\left(\frac{{}_2}{{}_{\mathrm{ii}}}\right)}^2-10.2& \left(2\right)\end{array}$ In the above equations, .sub.ii=(k.sub.i/j.sub.i).sup.1/2, k.sub.i is a torsional spring constant of the first connection portion around the first axis, and j.sub.i is an inertia moment of the fi

An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.

A micromechanical sensor is provided which includes a substrate having a main plane of extension and a rocker structure which is connected to the substrate via a torsion means. The torsion means extends primarily along a torsion axis, and the torsion axis is situated essentially in parallel to the main plane of extension of the substrate. The rocker structure is pivotable about the torsion axis from a neutral position into a deflected position, and the rocker structure has a mass distribution which is asymmetrical with respect to the torsion axis. The mass distribution is designed in such a way that a torsional motion of the rocker structure about the torsion axis is effected as a function of an inertial force which is oriented along a Z direction which is essentially perpendicular to the main plane of extension of the substrate.

An optical deflector is a piezoelectrically-driven optical deflector including a vibration mirror part having a reflection surface portion for reflecting light, a torsion bar part connected to the vibration mirror part, and a piezoelectric element that allows the vibration mirror part to swing around the torsion bar part so as to vibrate. Protruding portions are formed respectively at both end portions of the vibration mirror part in a main scanning direction of reflected light to protrude to an outer side in the main scanning direction.

Disclosed herein are devices and methods to generate a drive signal to actuate a MEMS mirror system. A controller can generate the drive signal to comprise a modified square wave voltage waveform comprising a tri-stated portion, an attenuated portion, or a tri-stated and an attenuated portion to suppress a number of harmonics in a response of the MEMS mirror system to the drive signal.