An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts, and a pair of first portions. One of the first portions is connected to one of the first connection portions and one of the second connection portions and extends in a inclined direction, and the other of the first portions is connected to the other of the first connection portions and the one of the second connection portions and extends in a inclined direction.

The improved scanning MEMS mirror device disclosed herein comprises a mirror body that is rotatable around a rotation axis with respect to a stationary body, wherein a rotation of the mirror body is flexibly restrained with at least one coupling element that biases the mirror body towards a neutral state. The coupling element comprises at least a bridge section and a first leaf spring section and a second leaf spring section. The first leaf spring section extends in an extension direction from a first end thereof at the bridge section towards a second end thereof that is connected to the mirror body. The second leaf spring section extends in an extension direction from a first end thereof at the bridge section towards a second end thereof where it is connected to the stationary body. The extension direction of the first leaf spring section and the extension direction of the second leaf spring section are at least substantially the same as the second planar direction. The leaf spring sections have a thickness defined in a direction orthogonal to the reference plane that is smaller than their width, defined in said first planar direction. The construction of the improved scanning MEMS mirror device results in an increased eigenfrequency of undesirable eigenmodes.

A resonator that includes a vibrating portion that has a piezoelectric film, and a lower and upper electrodes that face each other with the piezoelectric film interposed therebetween. Moreover, a holding portion is provided at least around a maximum displacement region of the vibrating portion and has an insulating film. A holding arm connects the vibrating portion and the holding portion, and include a conductive portion that is in contact with the insulating film of the holding portion in at least a region that faces the maximum displacement region of the vibrating portion. In addition, the conductive portion is electrically connected to the lower electrode or the upper electrode or is grounded.

A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.

A method comprising determining a concentration of one or more components of a wellbore servicing fluid during a wellbore servicing operation; and adjusting or maintaining a composition of the wellbore servicing fluid being introduced into a wellbore and/or an operational parameter of the wellbore servicing operation based on the determining of the concentration of the one or more components, wherein the determining of the concentration of the one or more components comprises contacting a sample of the wellbore servicing fluid with a microelectromechanical system (MEMS) device to provide a sample response indicative of the concentration of the one or more components.

A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.

A piezoelectric actuator including an anchor, an elastic layer having a first end coupled to the anchor, and a piezoelectric layer on the elastic layer. The elastic layer includes a solid sublayer including an elastic material and a second sublayer including a plurality of cavities. The piezoelectric layer is on the second sublayer of the elastic layer and includes a top electrode, a bottom electrode, and a piezoelectric material layer between the top electrode and the bottom electrode.

A micro-electromechanical transducer including one or more moveable members, and a viscoelastic substance having a predetermined viscoelasticity, the viscoelastic substance being adapted to influence the response of the transducer in a predetermined manner. The micro-electromechanical transducer of the present invention may include a MEMS transducer, such as a MEMS microphone, a MEMS vibration sensor, a MEMS acceleration sensor, a MEMS receiver.

In order to expand the surface area of a reflective layer, the space between adjacent turns of a drive coil, which is wound a plurality of turns on a peripheral edge front surface of the principal surface of a movable portion which, being inside a frame-formed support substrate, is connected to the support substrate by torsion bars, is filled and flattened with a smoothing layer, thereby adopting a configuration such that the reflective layer can also be provided in the region of the upper surface of the drive coil.

A method comprising determining a concentration of one or more components of a wellbore servicing fluid during a wellbore servicing operation; and adjusting or maintaining a composition of the wellbore servicing fluid being introduced into a wellbore and/or an operational parameter of the wellbore servicing operation based on the determining of the concentration of the one or more components, wherein the determining of the concentration of the one or more components comprises contacting a sample of the wellbore servicing fluid with a microelectromechanical system (MEMS) device to provide a sample response indicative of the concentration of the one or more components.