A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.

Isochronous pivot for a resonator including two flexible strips joining attachment points of a first and a second element, defining two strip directions, and a pivot axis, at the intersection of their projections or at their intersection, each strip having a free length between its attachment points, and an axial distance between the pivot axis and the attachment point thereof farthest from the axis, the attachment point ratio X=D/L being greater than one for each strip, the strip directions defining with the axis a first apex angle whose value in degrees is comprised between f1(X)=108+67/(10X−6), and f2(X)=113+67/(10X−6).

In order to expand the surface area of a reflective layer, the space between adjacent turns of a drive coil, which is wound a plurality of turns on a peripheral edge front surface of the principal surface of a movable portion which, being inside a frame-formed support substrate, is connected to the support substrate by torsion bars, is filled and flattened with a smoothing layer, thereby adopting a configuration such that the reflective layer can also be provided in the region of the upper surface of the drive coil.

A light deflector includes a mirror unit having a reflecting surface; a pair of supports supporting the mirror unit; a pair of drive beams; a frame supporting the pair of drive beams in a cantilevered state; and connecting parts connecting the pair of drive beams to the pair of supports, respectively. Each of the connecting parts has a first area between the first axis and a corresponding drive beam of the pair of drive beams, and a second area at an opposite side of the first area relative to the first axis. The second area includes a projection projecting in a first direction opposite to a second direction toward a portion at which the corresponding drive beam is supported by the frame. The projection includes a first fillet of a fillet shape at an end proximate to a corresponding support of the pair of supports.

A method for projecting an image comprising providing a scanning mirror having a resonance frequency which is unequal to a target operating frequency (aka “scanning frequency”) at which the mirror is to operate; and/or providing logic and an actuator e.g. motor; and/or using the scanning mirror to project at least one image, including repeatedly using the logic to measure the mirror's operating frequency and to control the actuator to apply at least one force, to the mirror, which causes the mirror's instantaneous operating frequency to equal the target operating frequency.

MEMS devices include fluid confinement structures on either a fixed part of a substrate and/or on a suspended element. The fluid confinement structures may be configured to confine a viscoelastic fluid in a limited part of a gap between one or more vertical sidewalls of both the fixed part of the substrate and either the suspended element or the drive beam or both the suspended element and drive beam such that one part of the gap is bridged by the fluid and another part of the gap is not, The structures may be configured to prevent flow of the fluid to other parts of the gap.

A movable device includes a light deflector including a movable part rotatable about a predetermined axis; a mount including a pair of stationary parts to which the light deflector is secured; and a substrate attached to an opposite side of a light-deflector side of the mount. The substrate has a through hole between the pair of the stationary parts.

A micromechanical component having a mounting support, at least one coil winding held by at least one coil brace and comprising conductor tracks made from at least one electrically conductive material, at least one first subsection of the at least one coil winding being anchored on the associated coil brace, and an adjustable part, the at least one coil brace and the adjustable part being connected to each other and via at least one spring element to the mounting support in such a way that the adjustable part is adjustable about at least one axis of rotation in relation to the mounting support, and, while the at least one first subsection of the at least one coil winding is anchored on the associated coil brace, at least one second subsection of the same coil winding spans at least one gap formed in the associated coil brace as a cantilever subsection.

An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.

An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.