A sensor includes a weight body, a frame which is located so as to surround the weight body when viewed from above, a beam part which is provided with flexibility and in which a first end is connected to the weight body and a second end is connected to the frame, and a detection part which is provided on the beam part and detects deformation of the beam part as an electric signal. The beam part includes a main part in which a cross-sectional shape in a direction perpendicular to a longitudinal direction connecting the first end and the second end is a rectangular shape, and an extending part which protrudes from at least one of an upper surface or a lower surface of the main part and extends in the longitudinal direction or extends in a width direction perpendicular to the longitudinal direction when viewed from above.

A steerable laser transmitter pairs a MEMS MMA with an optical amplifier to provide a high-power steered laser beam over a wide FOR. A single MEMS MMA may be positioned downstream of the optical amplifier. In a two-stage architecture, a MEMS MMA provides continuous fine steer upstream of the optical amplifier and a beam steerer, another MEMS MMA or a QWP and stack of switchable PGs, provides discrete coarse steering downstream. In the two-stage architecture, the upstream MEMS MMA is configured to limit its steering range to the acceptance angle of the optical amplifier, at most 22. The MEMS MMA may include piston capability to shape the wavefront of the beam.

A light deflector includes a mirror portion, torsion bars and extending from each side of the mirror portion along a rotation axis, inner actuators and coupling to outer coupling regions of the torsion bars and from both sides and reciprocally rotating the torsion bars and around the rotation axis, and a slit and a slit formed in the torsion bars and having closed both ends and extending along the rotation axis over a length range that reaches an inner coupling region and an outer coupling region.