An apparatus, system, and method for micro-electro-mechanical system (MEMS) micromirror including a plurality of stiffening structures is described. The MEMS micromirror includes a mirror surface to reflect light, a support platform coupled along a mirror surface, and a plurality of stiffening structures formed from or coupled to the support platform. In some examples, a dimensionality or density of the stiffening structures scale across an area of the support platform in a manner to assist in keeping the mirror surface flat under torsional force.

A grating reflector. The grating reflector includes a mesh structure defining a mesh plane and having a thickness normal thereto. The mesh structure includes parallel bars and parallel crossbars, which extend along a direction orthogonal to the bars. The bars and crossbars define a 2D grid of elongated holes, each extending through the mesh structure perpendicular to the mesh plane. The holes are elongated along a direction parallel to the bars and have a substantially rectangular shape with rounded corners. The 2D grid is defined by a cross-shaped unit cell having a bar section and an intersecting crossbar section. The grating reflector has a reflectivity in a bandwidth around a center wavelength higher than 0.99. A ratio between the unit cell volume and the center wavelength in the mesh material cubed is between 1.35 and 1.55.

A physical quantity sensor includes a substrate and a movable body. A first region to an n-th region in which a step is provided between adjacent regions are provided on a first surface of a first mass portion of the movable body. Ends of the first region to the n-th region on a side far from the rotation axis are referred to as a first end to an n-th end. In a state in which the movable body is maximally displaced around the rotation axis AY, when a virtual straight line passing through two ends of the first end to the n-th end and having a smallest angle with respect to the X axis is set as a first virtual straight line, and a straight line along a main surface of a first fixed electrode is set as a second virtual straight line, the first virtual straight line and the second virtual straight line do not intersect with each other in a region between a first normal line intersecting with an end of the first fixed electrode of the substrate closest to the rotation axis AY and a second normal line intersecting with an end of the first fixed electrode farthest from the rotation axis.

A MEMS capacitive microphone according to the present invention is configured such that a support plate 120 from which an inside thereof has been removed in a plane is attached to supports 110 each having an end fixed to a substrate 100, an anchor 130 is attached to an edge region of the support plate 120, an edge of a diaphragm 200 is supported by the anchor 130, and a “substrate-free area” includes the anchor 130 in a plan view, and pluralities of moving comb fingers 300 and stiffeners are attached to a top or bottom or a top and bottom of the diaphragm 200, and the supports 110 support the stationary comb fingers 400 arranged at predetermined intervals on both sides of the moving comb fingers 300 in a plan view.

A piezoelectric MEMS microphone is disclosed. The microphone includes a base having a cavity; a piezoelectric diaphragm; a fixation beam connecting with the piezoelectric diaphragm; and a support beam connecting with the base and the fixation beam. The piezoelectric diaphragm has a number of diaphragm sheets fixed by the fixation beam, each diaphragm sheet having a fixed end and a free end. The fixed end is connected with the fixation beam, and the free end extends from the fixed end to two sides and is suspended above the cavity. Compared with the related art, mechanical strength of the diaphragm sheet is improved, and the output intensity of the signal is improved.

A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.

In one example, an apparatus is provided. The apparatus is part of a Light Detection and Ranging (LiDAR) module of a vehicle and comprising: a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate, the MEMS comprising an array of micro-mirror assemblies. Each micro-mirror assembly comprises: a micro-mirror having a pixelated pattern of reinforcement structures on a back-side surface, the pixelated pattern being defined based on dividing the back-side surface into an array of pixels and comprising protrusion structures that protrude from the back-side surface, the pixelated pattern of reinforcement structures comprising non-uniform sub-patterns having non-uniform geometric planar shapes, non-uniform planar sizes, and non-uniform planar orientations on the back-side surface; and an actuator to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or to reflect light received by the LiDAR module to a receiver.

A method for manufacturing an electroacoustic transducer includes a frame; an element movable relative to the frame, the movable element including a membrane and a membrane rigidifying structure; a first transmission arm, the movable element being coupled to one end of the first transmission arm; in which method the membrane of the movable element is moved away from the frame by using a sacrificial layer of greater thickness at least at the periphery of the membrane.

A MEMS structure is provided. The MEMS structure includes a substrate having an opening portion and a backplate disposed on one side of the substrate and having acoustic holes. The MEMS structure also includes a diaphragm disposed between the substrate and the backplate and extending across the opening portion of the substrate. The diaphragm includes a ventilation hole, and an air gap is formed between the diaphragm and the backplate. The MEMS structure further includes a filler structure disposed on the diaphragm, and a portion of the filler structure is disposed in the ventilation hole.

A micromechanical component. The micromechanical component includes: a membrane; the membrane includes at least one reinforcement structure of a geometrically defined shape, which reinforces the membrane in a defined manner, in the region of at least one anchor structure and/or in the region of at least one connecting structure.