Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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7/00
Microstructural systems;; Auxiliary parts of microstructural devices or systems
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B81B7/0032
Packages or encapsulation
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B81B7/0035
for maintaining a controlled atmosphere inside of the chamber containing the MEMS
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B81B7/0038
using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
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