An optical device includes a support portion, a first movable portion having an optical surface, a second movable portion having a frame shape and surrounding the first movable portion, a first coupling portion coupling the first movable portion and the second movable portion to each other, a second coupling portion coupling the second movable portion and the support portion to each other, and a softening member which has a softening characteristic and to which stress is applied when the first movable portion swings around a first axis. When viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the second movable portion, the portion extending between a drive element and the first coupling portion, and is not electrically connected to an outside.

An optical module 1A includes a mirror unit 2 including a movable mirror 22 and a fixed mirror 16, a beam splitter unit 3, a light incident unit 4, a first light detector 6, a second light source 7, a second light detector 8, a holding unit 130, a first mirror 51, a second mirror 52, and a third mirror 53. The holding unit 130 holds the first light detector 6, the second light detector 8, and the second light source 7 so as to face that same side, and to be aligned in this order. A length of an optical path between the unit 3 and the detector 6 is shorter than a length of an optical path between the unit 3 and the detector 8, and a length of an optical path between the unit 3 and the source 7.

A micromechanical component includes a micromirror connected to a mounting support via at least one spring such that the micromirror is adjustable about at least one axis of rotation relative to the mounting support, where the micromirror includes a reflective surface developed at least partially on a first diaphragm surface of a mounted diaphragm of the micromirror, the diaphragm including a second diaphragm surface that faces away from the first diaphragm surface and that is mounted in air or vacuum.

In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.

A micromechanical component for a pressure sensor device, including a diaphragm that is stretched on a substrate and that is warpable via a pressure difference between a first side of the substrate and a second side of the substrate, and a rocker structure that is connected to the diaphragm in such a way that the rocker structure is movable about a first rotational axis via warping of the diaphragm. The rocker structure is connected to the diaphragm via a lever structure in such a way that the warping of the diaphragm triggers a rotational movement of the lever structure about a second rotational axis oriented in parallel to the first rotational axis and spaced apart from same, and the rotational movement of the lever structure about the second rotational axis triggers a further rotational movement of the rocker structure about the first rotational axis.

Hinge between a support and a movable part in an out-of-plane direction of a microelectromechanical structure, the hinge comprising two torsion beams, two bending elements connecting the movable part and the support and each comprising two beams extending perpendicularly to the axis of rotation each beam being connected to the support by a first end and to the movable part by a second end, the first ends and the second ends of the beams being disposed with respect to one another in such a way that the orientation of the first end towards the second end of one beam is opposed to the orientation of the first end towards the second end of the other beam.

Hinge for a micromechanical and/or nanomechanical structure comprising a support, a movable part in an out-of-plane direction, said hinge allowing for the out-of-plane displacement of the movable part, the hinge comprising two torsion beams extending along the axis of rotation of the hinge, two bending elements mechanically connecting the movable part and the support and comprising at least one pair of a first and of a second beam parallel with each other and extending in a plane perpendicular to the axis of rotation, the first beam being connected to the support and the second beam being connected to the movable part, the first and second beams being connected to one another by a first connecting element at a longitudinal end, the two beams extending in the same direction from the first connecting element.

According to an embodiment, a semiconductor device includes a first actuator, a second actuator, a first frame provided between the first actuator and the second actuator, a first connection member connecting the first actuator and the first frame to each other, a second connection member connecting the first actuator and the first frame to each other at a position different from a position at which the first connection member connects the first actuator and the first frame to each other, a third connection member connecting the second actuator and the first frame to each other, a fourth connection member connecting the second actuator and the first frame to each other at a position different from a position at which the third connection member connects the second actuator and the first frame to each other.

An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis so that the movable portion is swingable about the second axis, a first wiring which is provided on the connection portion, and a second wiring which is provided on the support portion. The rigidity of a first metal material forming the first wiring is higher than that of a second metal material forming the second wiring. The second wiring is connected to a surface opposite to the support portion in a first connection part located on the support portion in the first connection part.

A micromechanical device includes an actuator moveable along at least one rotational axis, and an electromagnetic type actuating device. The rotor is composed of a wire coil mounted on a moveable frame, which is rotationally integral with the actuator. The coil conducts the electric current. Protruding strands form a loop proximate the torsional beam. In another embodiment, the coil terminates through its two ends located on the moveable frame. The ends of the coil are each welded to one of the metal plates terminating on the moveable frame. Starting from the power supply pads on the fixed frame, the conductive lines transit through the torsional beam to join the ends of coil on the moveable frame. To make several plates going through one of the torsional beams, the beams are isolated electrically by a groove.