Actuators (140), which are a pair of members, are disposed one on either side of a movable frame (120) in the X-axis direction, and oscillate the movable frame (120) about the X axis in relation to a fixed frame (110) by deformation caused by stretching and contracting of piezoelectric elements. Actuators (150), which are a pair of members, are disposed one on either side of a mirror (130) in the Y-axis direction, and oscillate the mirror (130) about the Y axis in relation to the movable frame (120) by deformation caused by stretching and contracting of the piezoelectric elements. The length of each actuator (140) extending in the Y-axis direction is longer than a distance between an inner side of the fixed frame (110) to which the actuator (140) is connected and the middle point of an outer side of the movable frame (120) in the Y-axis direction.

A microelectromechanical accelerometer includes a microstructure, having sensing terminals and driving terminals distinct from the sensing terminals, a supporting body and a movable mass, coupled to the supporting body so as to be able to oscillate according to a sensing axis with respect to a rest position, and a control unit coupled to the microstructure so as to form a force feedback loop configured to maintain the movable mass in the rest position. The movable mass includes a sensing structure and a driving structure, respectively coupled to the sensing terminals and to the driving terminals through capacitive couplings variable as a function of displacements of the movable mass from the rest position. The sensing structure and the driving structure are electrically insulated and rigidly coupled with each other.

Disclosed is a MEMS device, comprising: a sensing element, including a movable electrode plate, a first electrode plate and a second electrode plate, the first electrode plate and the movable electrode plate forming a first capacitor; the second electrode plate and the movable electrode plate forming a second capacitor; the first capacitor and the second capacitor forming a detection capacitor of the sensing element; a differential mode detection module, performing differential mode detection on the first capacitor and the second capacitor; a common mode detection module, performing common mode detection on the first capacitor and the second capacitor; and a non-linearity elimination module, performing elimination of the non-linear relationship between the capacitance variation of the detection capacitor and the displacement of the movable electrode plate using the differential mode detection module output and the common mode detection module output.

A micromechanical component having a substrate, a membrane that covers an opening structured into the substrate from a first side of the substrate and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate, and having at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode can be displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate. A production method for a micromechanical component is also described.

A micromechanical system includes a substrate; a functional element that is mounted to as to allow movement in relation to the substrate; and an elastic stop element. The stop element has a first end that is attached to the substrate, and a second end that is configured to engage with the functional element when the functional element is deflected by a predefined amount from a neutral position. The stop element has an elastic configure in a first direction that coincides with a preferred direction of the functional element, and in a second direction that extends at a right angle to the first direction.

A microelectromechanical device for generating a fluid pressure. The microelectromechanical device includes a displacement structure, wherein the displacement structure has a movable membrane which can be deflected to generate the fluid pressure by means of a drivable connection structure acting on the membrane, and wherein the connection structure has a drive element and a deflection element connecting the membrane to the drive element. The deflection element has a lower flexural rigidity than the drive element and is elastically deformable when the membrane is deflected. A microelectromechanical loudspeaker having such a microelectromechanical device is also described.

A microelectromechanical gyroscope includes a die of semiconductor material forming a substrate and a detection structure suspended over the substrate. The detection structure has a main extension in a horizontal plane, is symmetrical with respect to a central axis of symmetry, and is provided, for each gyroscope detection axis, with: a first pair of detection masses arranged on a first side of the central axis of symmetry; and a second pair of detection masses arranged on a second side of the central axis of symmetry, opposite to the first side in the horizontal plane. The detection masses of each pair are capacitively coupled to respective stator electrodes according to a differential detection scheme. The stator electrodes are arranged symmetrically with respect to one another on opposite sides of the central axis of symmetry.

A MEMS (MicroElectroMechanical System) device includes: a supporting body; a movable mass, constrained to the supporting body by flexures so as to be able to oscillate in a main direction; an actuator device, configured to apply to the movable mass an electrostatic actuation force, transverse to the main direction; and a control circuit configured to detect stiction conditions, in which the movable mass is stuck to the supporting body by a stiction force, and for driving the actuator device in response to recognition of the stiction conditions. The actuation force is a variable force with an actuation frequency band containing at least one resonance frequency in a direction transverse to the main direction of a mechanical system comprising the movable mass stuck to the supporting body.

An electrically-connected MEMS precision motion stage includes a stationary portion, one or more electrically-conductive MEMS flexure assemblies coupled to the stationary portion, a movable portion coupled to the one or more electrically-conductive MEMS flexure assemblies, one or more motion control assemblies disposed between the stationary portion and the movable portion and configured to control motion of the movable portion, and one or more position sensors disposed adjacent to the one or more motion control assemblies and configured to enable detection of movement of the one or more motion control assemblies, respectively.

A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.