The MEMS mirror device includes a fixed member, a movable member rotatably coupled to the fixed member, a mirror, and a wire. The movable member includes a movable plate, a twist beam, and a meander beam. The meander beam is arranged along the twist beam. The mirror is formed on the movable plate. The wire extends from the movable plate to the fixed member. The wire is formed on the meander beam.

The present disclosure discloses a MEMS microphone chip. The diaphragm of the MEMS microphone chip is suspended on the substrate by a plurality of elastic connection portions connected with the vibration portion of the diaphragm. The vibration portion includes a central vibration portion and an outer vibration portion connected with the central vibration portion and the plurality of elastic connection portions. The back plate includes an anchor portion extending towards the diaphragm. The anchor portion is fixedly connected with the central vibration portion. Therefore, the diaphragm is mounted on the substrate by the plurality of elastic connection portions. The central vibration portion is anchored to the back plate by the anchor portion. The MEMS microphone chip in the present disclosure has higher reliability.

Methods, apparatuses and methods of manufacture are described for a MEMS electrostatic blade actuator with different configurations to allow for improvements to performance. The MEMS electrostatic blade actuator with different configurations can be used in a MEMS mirror to reduce mass or reduce operating voltage.