A sensor assembly includes a substrate including one or more electrical contact pads on at least an inner region of the substrate. The sensor assembly further includes a housing coupled to the substrate by a flange, the flange to provide a hermetic seal between the housing and the substrate. The housing is configured to be coupled to a fluid flow channel at a first end of the housing and at a second end of the housing. The sensor assembly further includes a sensor die coupled to the substrate at the inner region via the electrical contact pads. The sensor die is aligned to the substrate via one or more alignment features.

A method of manufacturing a dielectric barrier discharge (DBD) structure includes forming a patterned electrode layer around an outer perimeter of a substrate composed of a dielectric material. The patterned electrode layer includes multiple electrodes around the outer perimeter of the substrate and gaps between adjacent electrodes. The method further includes depositing a dielectric layer over at least a first region of the patterned electrode layer to form a DBD region of the DBD structure.