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Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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2207/00
Microstructural systems or auxiliary parts thereof
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B81B2207/09
Packages
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B81B2207/091
Arrangements for connecting external electrical signals to mechanical structures inside the package
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B81B2207/094
Feed-through, via
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