Nanoneedles and nanoneedle arrays and methods of making nanoneedles are provided. The methods can include multilayer fabrication methods using a negative photoresist and/or a positive photoresist. The nanoneedle arrays include one or more nanoneedles attached to a surface of a substrate. The nanoneedle can have both a proximal opening and a distal opening, and an inner passageway connecting the proximal opening and the distal opening. The nanoneedle can have a functional coating. The nanoneedle can include iron, cobalt, nickel, gold, and oxides and alloys thereof. The nanoneedle arrays can be used for the administration and/or the extraction of agents from individual cells. In one or more aspects, the nanoneedles can be magnetic nanoneedles. An oscillating magnetic field applied to a magnetic nanoneedle can induce one or both of heating and vibration of the magnetic nanoneedle. The heating and/or vibration can cause a magnetic nanoneedle to penetrate the wall of a cell.

The present invention relates to a molding die comprising a base portion and a pattern portion having recesses and protrusions provided on a surface of the base portion, wherein a distance between the centers of protruding portions of the pattern portion is 15 to 50 nm, a ratio of recessed and protruding portion (protrusion/distance between centers of the protruding portions) of the pattern portion is 0.5 or less, a height of the protruding portion of the pattern portion is 2 nm or more, and a defect density of the pattern portion is 10×10.sup.10 cm.sup.2 or less. The present invention also relates to a lens comprising a base portion and a pattern portion having recesses and protrusions provided on a surface of the base portion, wherein a distance between centers of protruding portions of the pattern portion is 15 to 50 nm.

Provided is a method of producing a microneedle array unit which is capable of suppressing damage to a microneedle array. The method of producing a microneedle array unit, including an array preparing step of preparing a microneedle array which includes a sheet and a plurality of needles arranged on one surface of the sheet; a container preparing step of preparing a container which includes an accommodating portion defining an opening and a space for accommodating the microneedle array, and a deformable portion disposed on a side opposite to the opening and integrated with the accommodating portion; an accommodating step of accommodating the microneedle array in the accommodating portion of the container by allowing the other surface of the sheet of the microneedle array and the deformable portion of the container to oppose each other; and a deforming step of deforming an outer surface of the accommodating portion inward, which is positioned between the one surface of the sheet of the microneedle array and the opening of the accommodating portion, to form a protrusion that reduces an area of the opening.

Disclosed herein is a microelectrode platform that may be used for multiple biosystem applications including cell culturing techniques and biosensing. Also disclosed are microfabrication techniques for inexpensively producing microelectrode platforms.

Alignment features for an optical fibre assembly are formed directly into an ion trap chip to align an optical module with respect to the ion trap chip. This is achieved using microfabrication techniques to etch alignment elements into the surface of the ion trap chip, advantageously carried out with lithographic precision achieving the alignment accuracy required of the optical beam geometries for the application, with an alignment accuracy of a few micrometres. The alignment elements are advantageously etched along defined crystal planes of the silicon substrate of the chip. An external microstructure can be micromachined with lithographic precision to contain locating features that will fit, or “plug”, into the recesses of the chip, for instance ion microtrap chip.

The present invention relates to a drug-coated microneedle and a method of manufacturing the same, and more particularly to a drug-coated microneedle that delivers a drug by physically piercing the stratum corneum of the skin and a method of manufacturing the same. The drug-coated microneedle is represented by Chemical Formula 1 below, and is capable of releasing a drug through a redox reaction after penetration into the skin. The drug-coated microneedle according to the present invention is capable of effectively delivering a drug having excellent functionality but low skin permeability, and is thus useful as a material for functional cosmetics for whitening, wrinkle reduction, inflammation reduction and the like. [Chemical Formula 1] MN-S—S-D. In Chemical Formula 1, MN is a silica-(SiO.sub.2)-containing microneedle, S—S is a disulfide bond, and D is a drug.

Disclosed is a micro pressure sensor including a plurality of modules that are operative over different ranges of pressure. The modules include a stack of at least two module layers, each module layer including a module body having walls that define a compartment and with the defined compartment partitioned into at least two sub-compartments, a port for fluid ingress or egress disposed in a first wall of the body, with remaining walls of the body being solid walls, a membrane affixed to a first surface of the module body covering the compartment, and an electrode affixed over a surface of the membrane.

A robust and general fabrication/manufacturing method is described herein for the fabrication of periodic three-dimensional (3D) hierarchical nanostructures in a highly scalable and tunable manner. This nanofabrication technique exploits the selected and repeated etching of spherical particles that serve as resist material and that can be shaped in parallel for each processing step. The method enables the fabrication of periodic, vertically aligned nanotubes at the wafer scale with nanometer-scale control in three dimensions including outer/inner diameters, heights/hole-depths, and pitches. The method was utilized to construct 3D periodic hierarchical hybrid silicon and hybrid nanostructures such as multi-level solid/hollow nanotowers where the height and diameter of each level of each structure can be configured precisely as well as 3D concentric plasmonic supported metal nanodisk/nanorings with tunable optical properties on a variety of substrates.

Embodiments disclosed herein include lithographic patterning systems for non-orthogonal patterning and devices formed with such patterning. In an embodiment, a lithographic patterning system comprises an actinic radiation source, where the actinic radiation source is configured to propagate light along an optical axis. In an embodiment, the lithographic patterning system further comprises a mask mount, where the mask mount is configurable to orient a surface of a mask at a first angle with respect to the optical axis. In an embodiment, the lithographic patterning system further comprises a lens module, and a substrate mount, where the substrate mount is configurable to orient a surface of a substrate at a second angle with respect to the optical axis.

Microdevices containing a chamber bound on one side by a nanoporous membrane are provided. The nanoporous membrane may contain hollow nanotubes that extend through the nanoporous membrane, from one surface to the other, and extend beyond the surface of the nanoporous membrane opposite the surface interfacing with the chamber. The nanotubes may provide a fluidic conduit between an environment external to the microdevice and the chamber, which is otherwise substantially fluid-tight. Also provided are methods of making a microdevice and methods of using the microdevices.