According to one embodiment, a pattern formation method includes forming a structure body on a first surface of a patterning member, the structure body having protrusions and a recess. The protrusions are arranged at a first pitch along a first direction. The first direction is aligned with the first surface. The recess is between the protrusions. The method further includes forming a resin film of a block copolymer on the structure body. The block copolymer includes first portions and second portions. The first and second portions are arranged alternately at a second pitch along the first direction. The structure body includes first and second regions. The first portions are on the first regions. The second portions on the second regions. The method further includes removing the second portions and the second regions, introducing a metal to the first regions, and etching the patterning member using the first regions.

A method of transfer printing comprises globally heating an array of stamps, where each stamp comprises a shape memory polymer with a light absorbing agent dispersed therein, and pressing the array of stamps to a donor substrate comprising a plurality of inks. Each stamp is thereby compressed from an undeformed adhesion-off configuration to a deformed adhesion-on configuration. The array of stamps is then cooled to rigidize the shape memory polymer and bind the plurality of inks to the stamps in the deformed adhesion-on configuration. The plurality of inks remain bound to the stamps while the array of stamps is positioned in proximity with a receiving substrate. A selected stamp in the array is then locally heated using a concentrated light source. The selected stamp returns to the undeformed adhesion-off configuration, and the ink bound to the selected stamp is released and transfer printed onto the receiving substrate.

The invention relates in particular to a method for producing subsequent patterns in an underlying layer (120), the method comprising at least one step of producing prior patterns in a carbon imprintable layer (110) on top of the underlying layer (120), the production of the prior patterns involving nanoimprinting of the imprintable layer (110) and leave in place a continuous layer formed by the imprintable layer (110) and covering the underlying layer (120), characterized in that it comprises the following step: at least one step of modifying the underlying layer (120) via ion implantation (421) in the underlying layer (120), the implantation (421) being carried out through the imprintable layer (110) comprising the subsequent patterns, the parameters of the implantation (421) being chosen in such a way as to form, in the underlying layer (120), implanted zones (122) and non-implanted zones, the non-Implanted zones defining the subsequent patterns and having a geometry that is dependent on the prior patterns.

The present invention is a flexible mold with variable thickness which is a mold body with nano-imprinting micro-structure, and the mold body is gradually thickened from its periphery to the middle. When the flexible mold with variable thickness of the present invention is subjected to a force or displaced, a larger amount of compression may be produced to cause a larger contact pressure between the micro-structure at the bottom of the mold body and the imprinted object, and to control the amount of deformation of the mold body upon stripping by the thickness difference of the mold body for overcoming the previous defect caused by the excessive draft angle or sharp pressure release.

An imprinting apparatus includes a silicon master having a plurality of nanofeatures defined therein. An anti-stick layer coats the silicon master, the anti-stick layer including a molecule having a cyclosiloxane with at least one silane functional group. A method includes forming a master template by: depositing a formulation on a silicon master including a plurality of nanofeatures defined therein, the formulation including a solvent and a molecule having a cyclosiloxane with at least one silane functional group; and curing the formulation, thereby forming an anti-stick layer on the silicon master, the anti-stick layer including the molecule. The method further includes depositing a silicon-based working stamp material on the anti-stick layer of the master template; curing the silicon-based working stamp material to form a working stamp including a negative replica of the plurality of nanofeatures; and releasing the working stamp from the master template.

The embodiments of the present disclosure provide an imprint template, a detection method and a detection device. The imprint template includes a first region and a second region located in the periphery of the first region. The first region is provided with a first imprint structure configured to imprint a first film layer pattern into a base material in a product region of a target substrate. The second region is provided with a second imprint structure configured to imprint a second film layer pattern into the base material in the periphery of the product region of the target substrate. And the second film layer pattern is used for assessing imprint quality of the first film layer pattern.

Provided are a hydrogel-encapsulated cell patterning and transferring method comprising: preparing a substrate having a hydrogel-encapsulated cell patterning comprising a first cell and an alginate hydrogel; preparing an agarose hydrogel substrate comprising agarose hydrogel and any one of a second cell and a physiological active substance; and disposing the substrate having the hydrogel-encapsulated cell patterning on the agarose hydrogel substrate and transferring the cell patterning and a biosensor comprising: a first substrate having a hydrogel-encapsulated cell patterning comprising a first cell and an alginate hydrogel; and an agarose hydrogel second substrate comprising agarose hydrogel and any one of a second cell and a physiological active substance.

A micro-nano incremental mechanical surface treatment method, comprising the following steps: using a modification tool having a designable end to contact a surface of a substrate material, rotating the modification tool in a local region and compressing the material surface, presetting processing parameters by means of 3D modeling software, and after the tool has processed the entire surface, enabling the tool to move downwards to the indented surface compressed previously. The process continues until the surface material is compressed to a pre-defined thickness, thereby achieving the goals of grain refinement and surface performance improvement. By means of the present method, a workpiece having a complex shape can be flexibly and designably surface modified. The method has the advantages of high bonding strength, no pollution, and low cost.

In various embodiments, the present invention provides a method comprising: disposing upon a first substrate, a first coating; texturing the first coating with a stamp; treating the textured first coating to form a master mold; where the master mold contains a mirror image of the texture contained in the first coating; and transferring the texture from the master mold to a second substrate.

The invention relates in particular to a method for producing subsequent patterns in an underlying layer (120), the method comprising at least one step of producing prior patterns in a carbon imprintable layer (110) on top of the underlying layer (120), the production of the prior patterns involving nanoimprinting of the imprintable layer (110) and leave in place a continuous layer formed by the imprintable layer (110) and covering the underlying layer (120), characterized in that it comprises the following step: at least one step of modifying the underlying layer (120) via ion implantation (421) in the underlying layer (120), the implantation (421) being carried out through the imprintable layer (110) comprising the subsequent patterns, the parameters of the implantation (421) being chosen in such a way as to form, in the underlying layer (120), implanted zones (122) and non-implanted zones, the non-Implanted zones defining the subsequent patterns and having a geometry that is dependent on the prior patterns.