Disclosed herein is a micro-electro-mechanical mirror device having a fixed structure defining an external frame delimiting a cavity, a tiltable structure extending into the cavity, a reflecting surface carried by the tiltable structure and having a main extension in a horizontal plane, and an actuation structure coupled between the tiltable structure and the fixed structure. The actuation structure is formed by a first pair of actuation arms causing rotation of the tiltable structure around a first axis parallel to the horizontal plane. The actuation arms are elastically coupled to the tiltable structure through elastic coupling elements and are each formed by a bearing structure and a piezoelectric structure. The bearing structure of each actuation arm is formed by a soft region of a first material and the elastic coupling elements are formed by a bearing layer of a second material, the second material having greater stiffness than the first material.

A microelectromechanical electroacoustic transducer includes: a supporting frame containing semiconductor material; a membrane made of semiconductor material connected to the supporting frame along a perimeter; a central piezoelectric transducer on a central portion of the membrane; elastic elements, defined by respective portions of the membrane, the central portion of the membrane being connected to the supporting frame by elastic elements; and metal lines extending on respective elastic elements and on the central portion of the membrane from the elastic elements to the central piezoelectric transducer. The metal lines are made of a metal immune to oxidation by exposure to the atmosphere.

A pressure sensor includes a substrate, a deformable detection element suspended on the substrate, and an anchoring structure configured to support the deformable detection element over the substrate. The deformable detection element extends at a distance from the substrate along a first direction and is deformable as a function of a pressure to be detected. The anchoring structure includes anchoring portions extending from the substrate, coupled to the deformable detection element, and arranged at a distance from each other along a second direction transversal to the first direction. A structural region of the anchoring structure extends between the anchoring portions along the second direction and include at least one release opening extending through the structural region.

A method for manufacturing an electroacoustic transducer includes a frame; an element movable relative to the frame, the movable element including a membrane and a membrane rigidifying structure; a first transmission arm, the movable element being coupled to one end of the first transmission arm; in which method the membrane of the movable element is moved away from the frame by using a sacrificial layer of greater thickness at least at the periphery of the membrane.