Robust and reliable microelectromechanical photoswitch devices are provided. The devices are better able to withstand mechanical shock and rough handling during transportation or field operation due to the use of a mechanical stop structure that limits displacement of movable parts of the devices and prevents their contacts from becoming locked. The technology also greatly extends the dynamic range of the sensors, enabling them to detect weak electromagnetic radiation signals as well as much stronger signals without damage when exposed to signals that are orders of magnitude larger than threshold.