Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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2201/00
Manufacture or treatment of microstructural devices or systems
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B81C2201/0174
for making multi-layered devices, film deposition or growing
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B81C2201/019
Bonding or gluing multiple substrate layers
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