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Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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2203/00
Forming microstructural systems
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B81C2203/01
Packaging MEMS
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B81C2203/0172
Seals
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B81C2203/019
characterised by the material or arrangement of seals between parts
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