Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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2203/00
Forming microstructural systems
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B81C2203/07
Integrating an electronic processing unit with a micromechanical structure
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B81C2203/0785
Transfer and j oin technology, i.e. forming the electronic processing unit and the micromechanical structure on separate substrates and joining the substrates
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B81C2203/0792
Forming interconnections between the electronic processing unit and the micromechanical structure
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