A 3D nanopore device for characterizing biopolymer molecules includes a first selecting layer having a first axis of selection. The device also includes a second selecting layer disposed adjacent the first selecting layer and having a second axis of selection orthogonal to the first axis of selection. The device further includes an third electrode layer disposed adjacent the second selecting layer, such that the first selecting layer, the second selecting layer, and the third electrode layer form a stack of layers along a Z axis and define a plurality of nanopore pillars.

One aspect of the disclosed is to provide a method of manufacturing a nanoporous multilayer graphene membrane, including a first step of oxidizing a surface of a multilayer graphene membrane, a second step of reducing the oxidized surface of the multilayer graphene to carry out reductive etching such that oxidized carbon atoms on the surface are naturally and randomly dispersed, and a third step of repeatedly performing a series of the first and the second steps until nanopores penetrating the multilayer graphene are formed.

An exemplary method includes forming a sacrificial layer along sidewalls of an array of trenches that are indented into a substrate, depositing a fill layer over the sacrificial layer, and then creating an array of gaps between the fill layer and the substrate by removing the sacrificial layer along the sidewalls of the trenches, while maintaining a structural connection between the substrate and the fill layer at the floors of the trenches. The method further includes covering the substrate, the fill layer, and the gaps with a cap layer that seal fluid-tight against the substrate and the fill layer. The method further includes indenting a first reservoir and a second reservoir through the cap layer, and into the substrate and the fill layer, across the lengths of the array of gaps, so that the array of gaps connects the first reservoir in fluid communication with the second reservoir.

According to some aspects, a semi-permeable membrane is provided for performing separation processes as well as its method of manufacture. In some instances, a membrane may include a porous substrate, and an active layer disposed upon the substrate. The active layer may include at least one atomically thin layer having a plurality of open pores that allow transport of some species through the membrane while restricting transport of other species through the membrane. The open pores may have a mean pore size between 0.5 nm and 10 nm and a number density between 10.sup.9 cm.sup.?2 and 1014 cm.sup.?2.

In a cell-capturing filter including a metal porous membrane, degradation over time is determined earlier. A cell-capturing filter includes a metal porous membrane having a plurality of through-holes that penetrate between two principal surfaces facing each other. The metal porous membrane is made of an alloy of nickel and an element selected from the group consisting of gold, platinum, and palladium, or a metal containing nickel as a main component. A metal containing copper as a main component is attached to a part of either one of the principal surfaces of the metal porous membrane. By checking a state change of the metal containing copper as a main component, degradation over time of the metal porous membrane can be determined earlier

Microstructure separation filters are provided herein, as well as chromatography and other separation devices. An exemplary filter device includes a microstructure filter has a plurality of layers of alternating sacrificial and/or structural material which have been etched to create inlet channels and outlet channels. Adjacent ones of the inlet channels and the outlet channels are spaced apart from one another by cross channels that filter a fluid from the inlet channels to the outlet channels. The cross channels include filter features formed by etching away of a portion of the layers. The device also includes a housing configured to receive the microstructure filter.

Disclosed are a graphene membrane and a method for manufacturing the same. The graphene membrane includes a graphene layer having a porous pattern including a plurality of pores having a size of 5 to 100 nm and a supporter configured to support the graphene layer and including a plurality of pores having a greater size than the pores of the graphene layer.

Disclosed is an improved form of nanopore-based molecular sensor: a stack of coaligned nanopores in an equivalent number of directly stacked membranes. One or more of the membranes is moved laterally, altering the volumetric shape and thus the sensing characteristics of the passage. This allows at least three major improvements over existing nanopore sensors: 1) volumetrically tunable sensors allow sensing over a wider range of analyte sizes, 2) volumetric shape changes allow a a novel form of translocation control over transiting molecules, enabling more information to be derived from single molecules through interactions with the walls of the passage and controllable alterations in the local electrostratic and hydrodynamic environment, and 3) volumetric shape changes allow regeneration of an appropriate sensor geometry in the event of corrosion or clogging, greatly extending the useful lifetime of individual sensors

Microstructure separation filters are provided herein, as well as chromatography and other separation devices. An exemplary filter device includes a microstructure filter has a plurality of layers of alternating sacrificial and/or structural material which have been etched to create inlet channels and outlet channels. Adjacent ones of the inlet channels and the outlet channels are spaced apart from one another by cross channels that filter a fluid from the inlet channels to the outlet channels. The cross channels include filter features formed by etching away of a portion of the layers. The device also includes a housing configured to receive the microstructure filter.

A filter for filtering nucleated cells that includes a body containing at least either a metal or a metal oxide as its main component; and plural through holes, each of which have a shape other than a square shape, formed therein. A longitudinal diameter of an inscribed ellipse within each of the through holes is smaller than a size of a nucleus of each of the nucleated cells to be filtered. The inscribed ellipse of the through hole is an ellipse that abuts all sides that define an opening of the through hole.