Patent classifications
B01D67/0065
Filter apparatus for semiconductor device fabrication process
A filter device includes one or more filter membranes, and a filter housing enclosing the one or more filter membranes. Each of the filter membranes includes a base membrane made of a ceramic material, and a plurality of through holes. The base membrane is coated with a coating material.
MICRO-SMOOTH POROUS HYBRID MATRIX MEMBRANE STRUCTURAL SUPPORT FOR A MEMBRANE SEPARATOR
The invention provides a porous hybrid matrix membrane support having at least one porous mesh layer of mesh densified to form a membrane mesh support and at least one porous filament layer of filaments that are generally non-woven, densified to form a membrane filament support. The filament layer is densified to provide a sufficiently small crevice depth in the membrane filament support that can help protect a membrane layer on the membrane filament support from rupturing. The membrane mesh support and the membrane filament support with micro-smooth surfaces can be integrally joined by diffusion bonding to resist separation across the adjoining surfaces. The combined, diffusion bonded support of both types of layers provide structural support sufficient for high pressures and provide substantial uniform permeability across the face of the structural support.
PARTICLE CAPTURE FILTRATION MEMBRANE, METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR MEASURING PARTICLE COUNT
A particle capture filtration membrane includes: a base membrane with a first communication pore; and a skin layer formed on one surface of the base membrane, a second communication pore opening on the skin layer. The second communication pore connects to the first communication pore, and the channel diameter of the second communication pore is smaller than the pore diameter of the first communication pore connecting to the second communication pore.
CARBON-DOPED MEMBRANES, METHODS OF MAKING SAME, AND USES THEREOF
Carbon-doped layers and methods of making and using same. In various examples, a carbon-doped layer is porous. In various examples, a carbon-doped layer is a carbon-doped metal oxide and/or metal layer. In various examples, a carbon-doped layer is disposed on at least a portion of substrate. In various examples, a method of making carbon-doped layer(s) comprises contacting a substrate with liquid carbon precursor(s) and optionally, water, and contacting the substrate with liquid precursor(s) and optionally, water with one or more vapor-phase metal and/or metal oxide precursor(s), where the carbon-doped layer(s) is/are formed. In various examples, a method further comprises the carbon-doped layer(s), where porous carbon-doped layer(s) is/are formed. In various examples, a filtration substrate comprises one or more porous carbon-doped layer(s). In various examples, a filtration substrate is used in a separation method or the like. In various examples, the method is an organic solvent nanofiltration (OSN) or the like.