The present invention concerns a dissolved ammonia delivery system, comprising at least one ultrapure water source configured to provide ultrapure water, at least one carrier gas source configured to provide at least one carrier gas, at least one ammonia (NH3) source configured to provide NH3, at least one ammonia saturation module having at least one of one main flow pathway and one bypass flow pathway in communication with the main flow pathway if both main flow pathway and bypass flow pathway are comprised by said at least one ammonia saturation module, the main flow pathway if present configured to have ultrapure water from the ultrapure water source flowed therethrough, the bypass flow pathway configured to receive at least a portion of the ultrapure water from the main flow pathway, if present, to form at least one ultrapure water bypass flow within the bypass flow pathway, wherein the carrier gas and NH3 introduced into the ultrapure water bypass flow resulting in NH3 dissolving in the ultrapure water bypass flow.

A substrate processing apparatus includes: at least one processing part for etching a polysilicon film or an amorphous silicon film formed on a substrate using an alkaline chemical liquid; a reservoir configured to recover and store the chemical liquid used in the at least one processing part; processing lines configured to supply the chemical liquid stored in the reservoir to the at least one processing part; a circulation line configured to take out the chemical liquid from the reservoir and to return the same to the reservoir; and a first gas supply line connected to the circulation line and configured to supply an inert gas to the circulation line. The circulation line includes an ejection port configured to eject a mixed fluid of the inert gas supplied by the first gas supply line and the chemical liquid taken out from the reservoir into the chemical liquid stored in the reservoir.

Systems and methods for delivering a gas, such as nitric oxide, are provided. In some embodiments, systems and methods are provided for delivering a gas, such as nitric oxide, in the form of nanobubbles and/or a dissolved gas using a liquid medium.