A gas flow metrology system for a substrate processing system includes N primary valves selectively flowing gas from N gas sources, respectively, where N is an integer. N mass flow controllers are connected to the N primary valves, respectively, to flow N gases from the N gas sources, respectively. N secondary valves selectively flow gas from the N mass flow controllers, respectively. A gas flow path connects the N secondary valves to a flow metrology system located remote from the N secondary valves, wherein the gas flow path includes a plurality of gas lines. A controller is configured to perform a hybrid flow metrology by selectively using a first flow metrology and a second flow metrology that is different from the first flow metrology to determine an actual flow rate for a selected gas at a desired flow rate from one of the N mass flow controllers.

A method of monitoring a solid component of a reactor feed stream in a polymer production system, comprising (a) measuring a turbidity of the reactor feed stream, wherein the reactor feed stream comprises a solid component of a polymerization catalyst system, and (b) translating the turbidity of the reactor feed stream into a concentration of the solid component in the reactor feed stream. A method of monitoring a solid component of a reactor feed stream in a polymer production system, comprising (a) measuring a turbidity of a precontactor feed stream, wherein the precontactor feed stream comprises a solid component of a polymerization catalyst system, and (b) translating the turbidity of the precontactor feed stream into a concentration of the solid component in a precontactor effluent stream, wherein the precontactor effluent stream comprises the reactor feed stream.

A reactor as a heat treatment device includes heat transfer structures removably placed in first flow channels, a first information acquisition unit connected to the inlet side of the first flow channels to acquire information for specifying a temperature and a flow rate of the first fluid which are reference conditions after lapses of time, a second information acquisition unit connected to the outlet side of the first flow channels to acquire the information for specifying the temperature of the first fluid after each lapse of time, and a control unit that calculates a heat exchange amount after each lapse of time in accordance with the temperature and the flow rate specified according to the information acquired by the first information acquisition unit and the second information acquisition unit, so as to estimate a service life of the heat transfer structures in accordance with the heat exchange amount.

A process provides for minimizing an amount of fuel gas utilized in an absorber off-gas incinerator and better control of emissions. The process provides for less temperature deviations in the absorber off-gas incinerator firebox and for less deviation in an amount of oxygen in the absorber off-gas incinerator stack gas.

A method of determining multimodal polyethylene quality comprising the steps of (a) providing a multimodal polyethylene resin sample; (b) determining, in any sequence, the following: that the multimodal polyethylene resin sample has a melt index within 30% of a target melt index; that the multimodal polyethylene resin sample has a density within 2.5% of a target density; that the multimodal polyethylene resin sample has a dynamic viscosity deviation (% MVD) from a target dynamic viscosity of less than about 100%; that the multimodal polyethylene resin sample has a weight average molecular weight (M.sub.w) deviation (% M.sub.wD) from a target M.sub.w of less than about 20%; and that the multimodal polyethylene resin sample has a gel permeation chromatography (GPC) curve profile deviation (% GPCD) from a target GPC curve profile of less than about 15%; and (c) responsive to step (b), designating the multimodal polyethylene resin sample as a high quality resin.

A reactor as a heat treatment device includes heat transfer structures removably placed in first flow channels, a first information acquisition unit connected to the inlet side of the first flow channels to acquire information for specifying a temperature and a flow rate of the first fluid which are reference conditions after lapses of time, a second information acquisition unit connected to the outlet side of the first flow channels to acquire the information for specifying the temperature of the first fluid after each lapse of time, and a control unit that calculates a heat exchange amount after each lapse of time in accordance with the temperature and the flow rate specified according to the information acquired by the first information acquisition unit and the second information acquisition unit, so as to estimate a service life of the heat transfer structures in accordance with the heat exchange amount.

The invention relates to a neutralization plant (100) comprising at least one reaction chamber (102) having a first feed (114) for an acid-containing product and at least one further feed (116) for a base-containing product, wherein at least one of the feeds (114, 116) comprises at least one valve means (118, 120) for controlling the inflow amount into the reaction chamber (102), wherein the ion controller apparatus (104, 204, 205) comprises at least one evaluation device (106, 206) set up for determining at least one actual ion concentration based on an actual pH of the mixture (122) present in the reaction chamber (102) and wherein the ion controller apparatus (104, 204) comprises at least one ion controller device (108, 208) comprising at least one ion controller (110, 210.1, 210.2, 211) set up for controlling the valve means (118, 120) according to the actual ion concentration and a target ion concentration.

Devices and methods for controlling the properties of chemical species during time-dependent processes. A device includes a reactor for containing one or more chemical species of a time-dependent process, an extraction pump for automatically and continuously extracting an amount of the one or more chemical species from the reactor, one or more detectors for measuring property changes of the one or more extracted chemical species and generating a continuous stream of data related to the one or more property changes to the one or more chemical species during a time interval, and a process controller configured to fit the continuous stream of data to a mathematical function to predict one or more properties of the one or more chemical species at a future time point and make one or more process decisions based on the prediction of one or more properties at the future time point.

Devices and methods for controlling the properties of chemical species during time-dependent processes. A device includes a reactor for containing one or more chemical species of a time-dependent process, an extraction pump for automatically and continuously extracting an amount of the one or more chemical species from the reactor, one or more detectors for measuring property changes of the one or more extracted chemical species and generating a continuous stream of data related to the one or more property changes to the one or more chemical species during a time interval, and a process controller configured to fit the continuous stream of data to a mathematical function to predict one or more properties of the one or more chemical species at a future time point and make one or more process decisions based on the prediction of one or more properties at the future time point.

An actuator is provided that includes a housing, a linear actuating shaft disposed within the housing, a piston coupled with the shaft, and a fluid barrier disposed on an end of the shaft and encircled by the piston. The piston is movable longitudinally between an extended configuration and a retracted configuration upon rotation of the shaft. The fluid barrier engages an inner surface of the piston preventing fluid communication across the fluid barrier. The fluid barrier has a shaft engaging side which receives the shaft and a fluid facing side. A cavity is formed between the piston and the fluid facing side and expands when the piston moves to the extended configuration and contracts when the piston moves to the retracted configuration. A port is disposed in the piston and extends from the cavity to external the piston thereby permitting fluid communication between the cavity and external the piston.