A substrate processing apparatus includes a holder that holds a substrate, a nozzle having a bottom portion in which a discharge port extending in one direction is formed, a mover that, above the substrate held by the holder, relatively moves at least one of the nozzle and the substrate with respect to another one in an intersecting direction that intersects with the one direction with a gap equal to or smaller than a predetermined distance provided between the bottom portion of the nozzle and the main surface of the substrate in order to cause a processing liquid to be discharged from the discharge port of the nozzle to the main surface of the substrate with use of capillary action, and a controller that controls the mover and relatively moves the nozzle and the substrate at a moving speed determined based on an outer peripheral shape of the substrate.

In one embodiment, a substrate treatment apparatus includes a mixer configured to mix a first liquid including a metal element and a second liquid being basicity to generate a third liquid including the metal element and being basicity. The apparatus further includes a supplier configured to supply the third liquid to a substrate. The apparatus further includes a first flow path configured to convey the third liquid from the mixer to the supplier not through a filter that removes particles from the third liquid.

Embodiments included herein are directed towards apparatuses, systems, and methods for fluid dispensing. Embodiments may include piezo-actuated valves, dispense cassettes, and closed loop systems for regulating pressure associated with fluid dispensers. Embodiments of an apparatus may include a piezo-actuated valve and a dispense cassette.

Provided is an apparatus for processing a substrate, the apparatus including: a liquid processing chamber for processing a substrate; and a liquid supply unit for supplying a liquid to the substrate. The liquid supply unit includes: a storage assembly in which a liquid is stored; a liquid supply pipe for supplying the liquid in the storage assembly to the liquid processing chamber; and a trap tank installed in the liquid supply pipe. The storage assembly includes: a pack unit including an inner pack in which a liquid is stored and an outer pack provided to surround the inner pack; and a pressurization unit for pressurizing the inner pack, and the liquid supply pipe is coupled to the inner pack so that the liquid in the inner pack is transmitted to the trap tank by gravity. The inside of the inner pack is provided with vacuum, and the liquid does not directly contact gas, thereby preventing bubbles from being generated inside the liquid. In addition, it is possible to save energy by transmitting the liquid in the inner pack to the trap tank by gravity.

In order to provide a device and a method for treating workpieces (102), which allow optimum treatment of the workpieces, a treatment station (114) comprises a treatment chamber (136) that can be flooded for the purpose of treating the workpiece.

Systems for creating electrodes for polymer electrolyte membrane fuel cells include an XY stage having a heated vacuum table physically coupled to the XY stage. The vacuum table has a working face with a plurality of channels formed therein to communicate vacuum pressure from a port coupled to a vacuum source to the channels. A sheet of perforated heat-conductive material has staggered holes configured to evenly distribute the vacuum pressure from the channels through the perforated sheet. A heat-conductive wire mesh is placed over the perforated sheet, and has openings smaller than the staggered holes such that a membrane material placed on the wire mesh is not deformed by the vacuum pressure. A nanopipette or micropipette coupled to a pump is configured to deposit electrode ink onto an exposed surface of the membrane material as the controller device causes the XY stage to move the vacuum table to control deposition of the electrode ink onto the surface of the membrane material.