Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape to a central axis. A rotation rack may be operable to rotate about the central axis of the vacuum chamber. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber in a substantially symmetrical manner from the outer perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a polymeric multi-layer coating on surfaces of the one or more devices. Each layer may have a different composition of atoms to enhance the water resistance, corrosion resistance, and fiction resistance of the polymeric multi-layer coating.

A method is provided for coating or filling a porous material. According to one embodiment, the method includes providing the porous material, delivering precursor molecules by gas phase exposure into pores of the porous material, and reacting the precursor molecules to form a polymer inside the pores.

Methods of modifying medical devices and medical devices are disclosed. One embodiment of a method of modifying a medical device includes functionalizing a surface of the medical device using cold plasma. One embodiment of a medical device is obtained by a method of modifying a device that includes functionalizing a surface of the medical device using cold plasma.

A coating composition for applying a very thin film coating to a substrate such as a polymeric film comprises a copolymer such as a block copolymer (BCP) that is compatible with the substrate, an alcohol solvent or solvents capable of dissolving the copolymer, a hydrolysed metal alkoxide precursor, a carboxylic acid stabiliser, and an active agent in an ionic, molecular, or small nanoparticle form. The active agent is configured to provide a functionality to the coating composition, selected from antimicrobial, antifungal, barrier, therapeutic, electrical, electronic, magnetic and optical. The composition is a sol comprising a continuous non-sedimentable/stable suspension of very small sized (of nano order) amorphous inorganic polymers in their oligomeric or polymeric state, and comprising the active agent dispersed in a hydrolysed metal alkoxide-BCP matrix. Substrates coated with very thin coatings are also provided, including coated LDPE which is activated before coating by UV/ozone, plasma or corona treatment prior to deposition of a wetting layer.

Methods and systems for forming a cured low-k material layer on a surface of a substrate and structures and devices formed using the method or system are disclosed. Exemplary methods include providing a substrate within a reaction chamber of a reactor system, providing one or more precursors to the reaction chamber, providing plasma power to polymerize the one or more precursors, and curing the low-k material with activated species to form the cured low-k material layer.