A haptic device comprising a base and at least one shaker branch. Said at least one branch is connected to the base by mobility means conferring a degree of freedom on the branch to move in rotation about a pivot axis relative to the base. An exciter member comprises electrical exciter means configured to cause said at least one branch to shake by moving in rotation about the pivot axis from a rest position to an activated position, and resilient return means tending to maintain each branch in the corresponding rest position.

A method for controlling an ultrasonic motor. From a starting velocity or starting position of the driven element, the method includes adjusting the frequency of the electrical excitation voltage such that it is equal to or close to the mechanical resonance frequency of the ultrasonic actuator; changing the frequency of the electrical excitation voltage using the signal of the velocity sensor or the position sensor towards the anti-resonance frequency of the ultrasonic actuator until an end velocity or an end position of the driven element is reached; and controlling the end velocity or position of the driven element with a predetermined accuracy by means of antiphase frequency change. Also disclosed is a corresponding control arrangement for an ultrasonic motor having an ultrasonic actuator with at least two acoustic wave generators, a driven element and a generator via a frequency adjustment.

Disclosed is an electrical-acoustic transformation device, including: a vibration system and a magnetic circuit system with a magnetic gap; wherein the vibration system includes: a diaphragm, a voice coil provided below the diaphragm and suspending in the magnetic gap, and a piezoelectric plate provided on one side of the diaphragm; and conductive lines are formed on the diaphragm, the conductive lines include a first conductive line connected to the piezoelectric plate to input an externally input first audio signal to the piezoelectric plate via the first conductive line. The electrical-acoustic transformation device in the present invention has a moving coil sound generating structure and a piezoelectric sound generating structure. The piezoelectric plate compensates the high-frequency response of the vibration system, realizing an electrical-acoustic transformation device with good performance and super wideband.

An acoustic device includes an acoustic MEMS device. An acoustic path communicates with the acoustic MEMS device. Ultrasound generated by vibration of the acoustic MEMS device can resonate in the acoustic path. An ultrasonic transducer has sound pressure frequency characteristics such that sound pressure peaks occur as a result of a combination of resonance of the acoustic MEMS device and resonance in the acoustic path. A relationship of about 5?(f0?fl)/f0?100?about 33 is satisfied, where f0 represents a resonance frequency of the acoustic MEMS device and fl represents a frequency lower than the resonance frequency and closest to the resonance frequency among frequencies at which the sound pressure peaks occur in the sound pressure frequency characteristics.

Disclosed herein are ultrasonic transducer systems comprising: an ultrasonic transducer comprising a substrate, a diaphragm, and a piezoelectric element; a first electrical circuitry coupled to the ultrasonic transducer, the first electrical circuitry configured for driving the ultrasonic transducer or detecting motion of the diaphragm; a plurality of electrical ports coupled to the ultrasonic transducer; and a second electrical circuitry connected to two or more of the plurality of electrical ports, the electrical circuitry comprising one or more of: a resistor, a capacitor, a switch, and an amplifier, wherein the second electrical circuitry is independent from the first electrical circuitry, and wherein the second electrical circuitry is configured to dampen the motion of the diaphragm.

An electronic device (1) includes a touch panel display (2), a speaker (3), and a piezo actuator (4). The speaker (3) outputs a sound based on a first sound signal corresponding to a range of a prescribed frequency or more. The piezo actuator (4) is provided on the touch panel display (2), and is deformed in response to at least one of a second sound signal corresponding to a range of less than the prescribed frequency and a control signal for haptics feedback based on a predetermined vibration pattern to vibrate the touch panel display (2).

Provided is a method for bonding wafers, which can bond the wafers to each other with high reliability while reducing the influence on the wafers. The method for bonding wafers includes the steps of: preparing a first wafer that has, on the surface thereof, a first metal layer with a first rigidity modulus, and a second wafer that has, on the surface thereof, a second metal layer with a second rigidity modulus higher than the first rigidity modulus; removing an oxide film at the surface of the second metal layer while an oxide film at the surface of the first metal layer is not removed; and bonding the surface of the first wafer to the surface of the second wafer.

An ultrasonic transducer (1) includes a base portion (14), a piezoelectric element (11), a vibration plate (10), and a resonator (12). The resonator (12) is joined to a first surface (21) of the vibration plate (10). A surface, of the piezoelectric element (11), on a side opposite to a side on which the piezoelectric element is joined to the base portion (14), is joined to a second surface (22) of the vibration plate (10). A through-hole (30) is formed in the piezoelectric element (11) so as to penetrate therethrough in a thickness direction of the vibration plate (10). In a planar direction orthogonal to the thickness direction of the vibration plate (10), a joined portion (40) between the vibration plate (10) and the resonator (12) is located inward of a node (20) of vibration of the vibration plate (10), and the through-hole (30) is located inward of the node (20).

An interdigitated transducer for generating Lamb waves is described herein, which is characterized by the particular geometry of the electrodes, such a transducer is particularly suitable to be used to make probes for 5 devices for the structural health monitoring of the integrity of materials.

Disclosed herein is a vibration device that includes: a coil; a drive circuit generating, based on induction electromotive force of the coil, a drive signal having a predetermined frequency; a piezoelectric element supplied with the drive signal; and a metal plate having a recess. The piezoelectric element is accommodated in the recess of the metal plate and stuck to a bottom surface of the recess through an adhesive.