A haptic substrate is provided. The haptic substrate includes a first electrode layer; an electroactive layer on the first electrode layer; a second electrode layer on a side of the electroactive layer away from the first electrode layer; a first pad layer electrically connected to the first electrode layer; and a second pad layer on a side of the second electrode layer away from the electroactive layer, the second pad layer being connected to the second electrode layer. In a region where an orthographic projection of the second electrode layer on a base substrate overlaps with the orthographic projection of the second pad layer on the base substrate, at least 30% of the second pad layer is in direct contact with the second electrode layer.

An acoustic imaging system coupled to an acoustic medium to define an imaging surface. The acoustic imaging system includes an array of piezoelectric acoustic transducers formed at least in part from a thin-film piezoelectric material, such as PVDF. The array is coupled to the acoustic medium opposite the imaging surface and formed using a thin-film manufacturing process over an application-specific integrated circuit that, in turn, is configured to leverage the array of piezoelectric actuators to generate an image of an object at least partially wetting to the imaging surface.

A method determines a fluid quantity relating to a fluid flowing in a measuring device. The measuring device has a measuring tube which receives the fluid, and first and second oscillation transducers. An excitation of a total wave, which is conducted through a wall of the measuring tube, by the first and/or second oscillation transducer, by wave components which are conducted in the wall being excited by the oscillation transducers in a plurality of excitation regions. These wave components are superposed to form the total wave. A distance between the centers of the excitation regions and the excitation frequency are selected such that an oscillation mode to be attenuated is quenched by destructive interference of the wave components in a propagation direction. Excitation of a compression oscillation of the fluid by the total wave occurs. Measurement data relating to the compression oscillation is used to determine the fluid quantity.

A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO.sub.3, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.

An imaging system includes: a transceiver cell for generating a pressure wave and converting an external pressure wave into an electrical signal; and a control unit for controlling an operation of the transceiver cell. The transceiver cell includes: a substrate; at least one membrane suspending from the substrate; and a plurality of transducer elements mounted on the at least one membrane. Each of the plurality of transducer elements has a bottom electrode, a piezoelectric layer on bottom electrode, and at least one top electrode on the piezoelectric layer. Each of the plurality of transducer element generates a bending moment in response to applying an electrical potential across the bottom electrode and the at least one top electrode and develops an electrical charge in response to a bending moment due to the external pressure wave.

An ultrasonic device includes: a substrate including a first groove portion and a second groove portion in a first surface; a vibration film provided on the first surface and closing the first groove portion and the second groove portion; a first piezoelectric element provided on the vibration film and overlapping the first groove portion in a plan view as viewed in a thickness direction of the substrate; and a second piezoelectric element provided on the vibration film and overlapping the second groove portion in the plan view. The substrate is provided with a third groove portion coupling the first groove portion to the second groove portion. The substrate is provided with a fourth groove portion extending in a direction away from the first piezoelectric element and the second piezoelectric element in the plan view and coupled to the third groove portion. A hole portion coupling a second surface of the substrate that is opposed to the first surface to the fourth groove portion is provided.

A transceiver includes an array of pMUT elements, where each pMUT element includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode; and a first electrode disposed on the piezoelectric layer. Each pMUT element exhibits one or more modes of vibration.

An imaging system includes: a transceiver cell for generating a pressure wave and converting an external pressure wave into an electrical signal; and a control unit for controlling an operation of the transceiver cell. The transceiver cell includes: a substrate; at least one membrane suspending from the substrate; and a plurality of transducer elements mounted on the at least one membrane. Each of the plurality of transducer elements has a bottom electrode, a piezoelectric layer on bottom electrode, and at least one top electrode on the piezoelectric layer. Each of the plurality of transducer element generates a bending moment in response to applying an electrical potential across the bottom electrode and the at least one top electrode and develops an electrical charge in response to a bending moment due to the external pressure wave.

An imaging device includes a two dimensional array of piezoelectric elements. Each piezoelectric element includes: a piezoelectric layer; a bottom electrode disposed on a bottom side of the piezoelectric layer and configured to receive a transmit signal during a transmit mode and develop an electrical charge during a receive mode; and a first top electrode disposed on a top side of the piezoelectric layer; and a first conductor, wherein the first top electrodes of a portion of the piezoelectric elements in a first column of the two dimensional array are electrically coupled to the first conductor.

A piezoelectric device according to an embodiment comprises a piezoelectric thin film, a first electrode disposed on a first surface of the piezoelectric thin film, a substrate provided with an electrode pad, a plurality of pillar-shaped first supporting members provided between a second surface on an opposite side of the first surface of the piezoelectric thin film and the electrode pad of the substrate so as to fix the piezoelectric thin film onto the substrate, and a plurality of second electrodes electrically connected to the electrode pad from a part of the second surface of the piezoelectric thin film via a lateral surface of the first supporting member. The piezoelectric thin film, the first electrode, and the second electrodes compose a plurality of diaphragms each of which is a transducer element. The first supporting members are provided at locations at which the respective diaphragms are sectioned. The first electrode is provided in common to the diaphragms.