Patent classifications
B08B9/34
System and Method for Cleaning Carrier
This invention provides a method and a system for cleaning a container for storing wafers or masks. A contained with lid is washed directly after the container is loaded with lid opened in the cleaning system. Gas exchange rate in the washing station can be increased such that particles or AMC inside the container or attached to the lid can be carried out more easily. Then, contamination-free gas is purged to the container as well as lid in a high temperature environment. A vacuum station can be optionally adapted between the washing station and the contamination-free gas purging station to enhance the cleanliness of the container.
Method and apparatus for cleaning
A method of cleaning a concrete bowl is provided including the steps of a) introducing water into at least one concrete bowl; b) collecting the water from the bowl after it has been used; and c) cleaning a concrete bowl by introducing at least some of the collected water into the bowl under pressure.
Method and apparatus for cleaning
A method of cleaning a concrete bowl is provided including the steps of a) introducing water into at least one concrete bowl; b) collecting the water from the bowl after it has been used; and c) cleaning a concrete bowl by introducing at least some of the collected water into the bowl under pressure.
REACTOR CLEANING APPARATUS AND REACTOR CLEANING METHOD
The present disclosure provides a reactor cleaning apparatus including: a fixing part having a partial region inserted into a hole formed in an upper portion of a reactor to be coupled to the reactor and fixing a pipe; the pipe inserted into a hole formed in the fixing part, protruding downward from the fixing part, and having a length adjustable in a vertical direction; a spray nozzle provided at a lower end of the pipe; and a screener provided on a lower side surface of the pipe, and a reactor cleaning method using the same.
Method for removing contaminating particles from containers
A method and a device (50) for removing fragments and/or particles from containers, such as in particular glass tubes (5), provides means for adjusting the electrostatic force (40) in the tubes (5) and means for removing (60) of the fragments. The means for removing (60) can comprise a jet of fluid, of measured speed, put in the containers (5) by a nozzle (2), whereas the means for adjusting the electrostatic force (40) can comprise an element (1) for putting an electrically conducting fluid (8) with a measured resistivity in the containers (5). This way, the fluid (8), for example ionized air, acts in order to reduce and/or eliminate the electrostatic charge, and therefore the electrostatic force, between the fragments (30) and the surface of the containers, assisting the removal by means of jets of fluid or by suction means.
Method for removing contaminating particles from containers
A method and a device (50) for removing fragments and/or particles from containers, such as in particular glass tubes (5), provides means for adjusting the electrostatic force (40) in the tubes (5) and means for removing (60) of the fragments. The means for removing (60) can comprise a jet of fluid, of measured speed, put in the containers (5) by a nozzle (2), whereas the means for adjusting the electrostatic force (40) can comprise an element (1) for putting an electrically conducting fluid (8) with a measured resistivity in the containers (5). This way, the fluid (8), for example ionized air, acts in order to reduce and/or eliminate the electrostatic charge, and therefore the electrostatic force, between the fragments (30) and the surface of the containers, assisting the removal by means of jets of fluid or by suction means.
BOTTLE CAP THREAD RINSING SYSTEM
Systems and methods for rinsing beverage residue from a mechanical interface between threads of a bottle and threads of a bottle cap is described. The bottle cap may include a sealable coating to create a seal against a rim of the bottle. The bottle cap may also include passages to allow pressurized water to be injected into an upper inner region of the bottle cap. The pressurized water is prevented from entering the bottle due to the seal between the rim of the bottle and the sealable coating of the bottle cap. Therefore, the pressurized water is caused to escape through the mechanical thread interface toward a lower inner region of the bottle cap where the water escapes from the cap at atmospheric pressure.
BOTTLE CAP THREAD RINSING SYSTEM
Systems and methods for rinsing beverage residue from a mechanical interface between threads of a bottle and threads of a bottle cap is described. The bottle cap may include a sealable coating to create a seal against a rim of the bottle. The bottle cap may also include passages to allow pressurized water to be injected into an upper inner region of the bottle cap. The pressurized water is prevented from entering the bottle due to the seal between the rim of the bottle and the sealable coating of the bottle cap. Therefore, the pressurized water is caused to escape through the mechanical thread interface toward a lower inner region of the bottle cap where the water escapes from the cap at atmospheric pressure.
Tool and method of developing
A tool and a method of developing are provided. In various embodiments, the method of developing includes rotating a wafer at a first rotating speed. The method further includes dispensing a developer solution onto the wafer at the first rotating speed by a first nozzle above the wafer, wherein the first nozzle moves back and forth along a path during dispensing the developer solution. The method further includes rotating the wafer at a second rotating speed to spread the developer solution onto the wafer uniformly. The method further includes dispensing a rinse solution onto the wafer at the second rotating speed by a second nozzle above the wafer.
Bottle cap thread rinsing system
Systems and methods for rinsing beverage residue from a mechanical interface between threads of a bottle and threads of a bottle cap is described. The bottle cap may include a sealable coating to create a seal against a rim of the bottle. The bottle cap may also include passages to allow pressurized water to be injected into an upper inner region of the bottle cap. The pressurized water is prevented from entering the bottle due to the seal between the rim of the bottle and the sealable coating of the bottle cap. Therefore, the pressurized water is caused to escape through the mechanical thread interface toward a lower inner region of the bottle cap where the water escapes from the cap at atmospheric pressure.