In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

An automatic positioning and clamping tool for mounting in a CNC Tilting Rotary Table for positioning and clamping a wheel rim for processing by a cutting tool includes a base, an upright post mounted at the base, air leakage detection units mounted on the base for supporting the wheel rim and detecting an air leakage, clamping devices mounted on the base for clamping the border edge of the wheel rim, a lateral chip conveyor, nozzles mounted around the periphery of the lateral chip conveyor, a vertical hydraulic chuck mounted around the upright post for moving a positioning gripper into abutment against the bore wall of the center bore of the wheel rim, and fluid nozzles mounted in the vertical hydraulic chuck for flushing away chips during processing. Thus, the invention is a compact structure with functions of air leakage detection, wheel rim automatic positioning and clamping and chip removal.

An automatic positioning and clamping tool for mounting in a CNC Tilting Rotary Table for positioning and clamping a wheel rim for processing by a cutting tool includes a base, an upright post mounted at the base, air leakage detection units mounted on the base for supporting the wheel rim and detecting an air leakage, clamping devices mounted on the base for clamping the border edge of the wheel rim, a lateral chip conveyor, nozzles mounted around the periphery of the lateral chip conveyor, a vertical hydraulic chuck mounted around the upright post for moving a positioning gripper into abutment against the bore wall of the center bore of the wheel rim, and fluid nozzles mounted in the vertical hydraulic chuck for flushing away chips during processing. Thus, the invention is a compact structure with functions of air leakage detection, wheel rim automatic positioning and clamping and chip removal.

An automatic positioning and clamping tool for mounting in a CNC Tilting Rotary Table for positioning and clamping a wheel rim for processing by a cutting tool includes a base, an upright post mounted at the base, air leakage detection units mounted on the base for supporting the wheel rim and detecting an air leakage, clamping devices mounted on the base for clamping the border edge of the wheel rim, a lateral chip conveyor, nozzles mounted around the periphery of the lateral chip conveyor, a vertical hydraulic chuck mounted around the upright post for moving a positioning gripper into abutment against the bore wall of the center bore of the wheel rim, and fluid nozzles mounted in the vertical hydraulic chuck for flushing away chips during processing. Thus, the invention is a compact structure with functions of air leakage detection, wheel rim automatic positioning and clamping and chip removal.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (441). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member (412) and a fixed chuck member. The movable chuck member (412) includes a second chucking magnetic material (442). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (9), and the first chucking magnetic material (441) comes in close proximity to the second chucking magnetic material (442). The substrate (9) is held by magnetic action between the first chucking magnetic material (441) and the second chucking magnetic material (442). It is thus possible to hold the substrate (9) with a simple structure.

A hole saw assembly having a drive shaft, drive disk and hole saw blade. The drive disk has a plurality of radially extending projections that engage with engagement slots in the side of the hole saw blade.