A method includes placing a first wafer onto a surface of a first wafer chuck, the first wafer chuck including multiple first profile control zones separated by one or more shared flexible membranes. The method also includes setting a first profile of the surface of the first wafer chuck. Setting a first profile of the surface of the first wafer chuck includes adjusting a first volume of a first profile control zone of the multiple first profile control zones. Setting a first profile of the surface of the first wafer chuck also includes adjusting a second volume of a second profile control zone of the multiple first profile control zones, the first volume of the first profile control zone being adjusted independently from the second volume of the second profile control zone, and the second adjustable volume encircling the first adjustable volume.

The invention relates to an expanding clamping sleeve for an expanding chuck having a first and a second bearing section, a clamping section that can grasp a tool, and a thrust section that is arranged between the clamping section and the first bearing section. The invention further relates to a toolholder having such an expanding clamping sleeve, wherein a contact surface is provided for a tool-side stop. The invention finally relates to a method for clamping a tool using an expanding chuck, in which, in a first step, a shaft of the tool is inserted into the expanding chuck, then the expanding chuck is subjected to pressure so that a clamping section of the expanding chuck clamps the tool shaft in the radial direction, and a thrust section of the expanding chuck displaces the tool shaft in the axial direction so that a tool-side stop is forced against a contact surface of a toolholder with an axial minimum clamping force.

A method of determining pull-out of a cutting tool mounted in a rotatable tool holder includes the steps of rotating the tool holder and thus the cutting tool, machining a work piece with the rotating cutting tool, measuring an axial position of the cutting tool in the tool holder during machining by a position sensor in the tool holder, calculating an axial displacement from an initial position of the cutting tool by the measured axial position, and determining pull-out of the cutting tool when the axial displacement exceeds a threshold value. A rotatable tool holder for a cutting tool, a machine tool system including a rotatable tool holder and use of the tool holder and machine tool system is also provided.

A tool holder with a main part, a deformable receiving portion for clamping a tool, and at least one blocking element which is designed to engage into a corresponding counter element on the tool in order to prevent the tool from moving axially out of the tool holder. The at least one blocking element is integrally formed with the receiving portion. A clamping system having such a tool holder and a method for producing a receiving portion for such a tool holder are also described.

A device for machining a gear using a rotating machining tool. The device has a motor spindle having a drive motor and motor spindle shaft drivable by the drive motor for driving the machining tool. The device has an attachment structure for releasably attaching the device to a work spindle of a tool head. The attachment structure is configured so the tool axis is parallel to the work spindle axis when the device is attached to the work spindle. A device is further disclosed to connect a machining tool to a counter bearing in a simple manner. For this purpose, the counter bearing has a hollow shaft. A mandrel having first and second clamping regions are arranged at positions along the longitudinal axis of the mandrel. The mandrel is inserted through the hollow shaft along the tool axis into a longitudinal bore of the machining tool.

A tool holder having a tool receptacle for chucking a tool shaft by frictional engagement, in which the tool receptacle comprises a plurality of annular clamping surfaces spaced apart from one another, which are intended for retaining the tool shaft by nonpositive engagement and are embodied on the inner circumference of a tube part, and the tube part has a recess in the material for varying its clamping action; the recess in the material is embodied by a plurality of annular channels extending in the circumferential direction, which are each separated from the tool receptacle by a resilient wall portion, which on its side facing away from the channel embodies the respective clamping surface.

Hydraulic expansion chuck with a basic body, with an expansion bush which is received in the basic body and defines a reception space for a tool to be clamped, and with a pressure chamber which is delimited between the expansion bush and the basic body. A securing pin extends through the basic body and the expansion bush into the reception space. Also broadly contemplated herein is a method for producing a hydraulic expansion chuck via: providing a basic body with a blind hole, into which an internal thread is cut. An expansion bush is then soldered into the basic body. Finally, an orifice is made at the bottom of the blind hole and extends through the material of the expansion bush into a tool reception space which is delimited in the expansion bush.

A hydraulic chuck may include an expansion sleeve, a plurality of pistons, and an actuator ring. The expansion sleeve may include a bore. The plurality of pistons may be axially mounted in at least one piston chamber of the expansion sleeve. The actuator ring may be rotatably mounted relative to the expansion sleeve. The actuator ring may be configured to actuate the plurality of pistons in the at least one piston chamber to hydraulically expand the expansion sleeve to provide a varying clamping force within the bore.

Hydraulic expansion chuck with a basic body, with an expansion bush which is received in the basic body and defines a reception space for a tool to be clamped, and with a pressure chamber which is delimited between the expansion bush and the basic body. A securing pin which extends through the basic body and the expansion bush into the reception space. Also broadly contemplated herein is a method for producing a hydraulic expansion chuck via: providing a basic body with a blind hole, into which an internal thread is cut. An expansion bush is then soldered into the basic body. Finally, an orifice is made at the bottom of the blind hole and extends through the material of the expansion bush into a tool reception space which is delimited in the expansion bush.

A hydraulic chuck assembly includes a tool support member having an axial bore. An expansion sleeve is received within the axial bore of the tool support member. The expansion sleeve comprises an inner surface, an outer surface and a front flange extending radially outward from the outer surface. A primary pressure chamber is formed between the axial bore of the tool support member and the outer surface of the expansion sleeve. A flexibility of the expansion sleeve is increased by removing material from the expansion sleeve in a vicinity of a front braze ring and a rear braze ring, thereby decreasing a maximum stress in the front braze ring and the rear braze ring. The material is removed by undercuts that form secondary pressure chambers in fluid communication with the primary pressure chamber.