A desktop horizontal joint robot, including: a lift apparatus and a fixation apparatus. The lift apparatus includes: a base, a casing supported on the base, a slider seat liftably arranged within the casing, and a lift driving mechanism configured to move the slider seat. The fixation apparatus includes: a fixation seat in fixed connection with the slider seat, a first rotational shaft rotatably supported at the fixation seat, and a first shaft driving assembly configured to rotate the first rotational shaft. An optical length encoder is arranged within the casing and configured to detect a linear displacement of the slider seat. The fixation apparatus further include a first optical angle encoder configured to detect a rotation angle of the first rotational shaft. The desktop horizontal joint robot features non-wear, high reliability, and long service life.

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a plurality of treating chambers performing a respective treatment on a substrate therein; a transfer chamber having a robot transferring the substrate between the plurality of treating chambers; a detection unit mounted on the robot and configured to detect a substrate state; and a controller for controlling the detection unit, wherein the detection unit comprises: an imaging member for imaging the substrate; and a driving member for moving the imaging member, and wherein the controller controls the detection unit to image and store an image of the substrate at an optimal position and determines whether an image of the substrate is a normal state based on the image obtained in the optimal position, the optimal position determined based on a process variable of the treating chamber.

A first driving device includes a motor including a rotating shaft, a speed reducer, and a supporting member. The speed reducer includes a rigid gear, a flexible gear configured to partially mesh with the rigid gear, and a wave motion generator coupled to the rotating shaft and configured to come into contact with the inner circumferential surface of the flexible gear, bend the flexible gear, and move a meshing position of the rigid gear and the flexible gear in the circumferential direction. The wave motion generator includes a projecting section projecting along the rotating shaft. The rotating shaft is supported by the supporting member via a bearing including an inner ring and an outer ring. The outer ring of the bearing is supported by the supporting member. The rotating shaft and the projecting section are coupled to the inner ring of the bearing by tight fitting.

A proximity sensing autonomous robotic system and apparatus is provided. The robot includes one or more vision modules for viewing the environment for depth perception, object detection, object avoidance and temperature detection of objects. A proximity sensing skin is laminated on one or more parts of the robot. The proximity sensing skin includes a plurality of proximity sensors and mechanical stress sensors for collision avoidance, speed control and deceleration of motion near detected objects, and touch recognition. The proximity sensing skin may include conductive pads for contacting different materials in a composite part to inhibit galvanic corrosion. The robot includes an end effector to which different tools may be attached for performing different tasks. The end effector includes a mounting interface with connections for supplying power and hydraulic/pneumatic control of the tool. All wiring to the sensors and vision modules are routed internally within the robot.

A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

An apparatus including a robot drive, a first arm connected to the robot drive, and a second arm connected to the robot drive. The first arm includes a first upper arm, a first forearm and a first end effector. The second arm includes a second upper arm, a second forearm and a second end effector. The first and second upper arms are connected to a first drive shaft of the robot drive. The first and second upper arms are either a same member or two members stationarily connected to one another. While the first arm is being extended and retracted, straight movement of the first end effector is provided relative to the robot drive along an axis which intersects a drive axis of the robot drive, where a wrist joint of the first arm does not intersect the drive axis while the first arm is being extended and retracted.

A workpiece conveyance device includes a base body disposed adjacent to a press machine, a pair of first arms, a pair of second arms, and a first holding portion and a second holding portion independent of each other. Each of the first holding portion and the second holding portion includes a plurality of holding members configured to hold a workpiece W. The first holding portion includes a first support member, a second support member, and an absorption member. The second support member movably supports the first support member along an intersection direction. The absorption member allows movement of the second support member caused in the intersection direction relative to the first support member, and makes it possible for the second support member to return to an initial position in the intersection direction relative to the first support member.

A compact cleaning apparatus including a robot with a narrow range of motion is provided. The cleaning apparatus includes: a cleaning chamber; a cleaning station; a drying station; a separation wall; a single axis robot including a column arranged adjacent to a side surface, a linear guide extending vertically, and a vertical moving saddle movable vertically; an arm portion including a first rotation saddle rotatable about a second axis extending vertically, a first arm swingable about a third axis extending horizontally and extending orthogonal to the third axis, a second arm rotatable about a fourth axis orthogonal to the third axis, a second rotation saddle rotatable about a fifth axis orthogonal to the fourth axis, a third rotation saddle rotatable about a sixth axis orthogonal to the fifth axis; and a hand for gripping a workpiece.

A substrate transport arm including a first link; a second link rotatably connected to the first link; a third link rotatably connected to the second link at a wrist joint; and a mechanical transmission having a pulley. The third link includes an end effector configured to support a substrate thereon. The mechanical transmission is connected to the third link to control rotation of the third link on the second link. The mechanical transmission is configured to control rotation of the third link as a function of an angle between the first and second links such that, as the first and second links are rotated relative to each other, the wrist joint follows a wrist path which includes a curved portion, and where a center of the substrate supported on the end effector is moved along a substantially straight substrate path as the wrist joint follows the curved portion.

A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.