The present invention relates to a turntable mechanism, including a flat plate and a rotating device for driving the flat plate to rotate, where the flat plate rotates to generate a negative pressure between a lower surface of the flat plate and a surface of an adsorbed object, the flat plate and the adsorbed object adhere together by an adsorption force generated by the negative pressure, and in this case, a gap is kept between the lower surface of the flat plate and the surface of the adsorbed object. In the present invention, a continuous, consistent, and stable fluid film is formed between the turntable and the adsorbed object, and a secondary flow is not easily generated, thereby ensuring that the adsorption force between the rotating flat plate and the adsorbed object is more stable.

An apparatus and method for sorting a plurality of substrates is disclosed. The apparatus includes a sorting unit capable of supporting a plurality of bins, a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis, a plurality of grippers coupled to the rotatable support on a common radius relative to the rotational axis, the grippers positioned to travel along a path above the bins as the rotatable support rotates, and an air nozzle configured to reorient a sorted substrate relative to a stacked substrate in a bin of the plurality of bins when released by one of the grippers into the bin.

The present disclosure is directed to an adjustable joint for insertion into a linkage of a substrate handler utilized for substrate processing. The adjustable joint allows for adjusting the pitch and roll of an attached link. Such adjustment may permit aligning a pickup surface of an end effector to a desired plane. Once adjusted, the joint may be fixed to maintain the desired orientation of the attached link. The adjustable joint allows for correcting deflection of a pickup surface of an end effector relative to a desired pickup plane due to, for example, drooping caused by high temperature usage, mechanical tolerances and/or installation errors.

Swirl flow-forming body includes main body, first end face that is formed at main body and faces a member to which suction is applied, hole that opens on first end face, jetting port that is formed on inner periphery of main body, inner periphery facing hole, and fluid passage that allows fluid to be discharged into hole via jetting port so as to form a swirl flow that generates negative pressure for applying suction to the member. Inner periphery is formed so as to guide fluid discharged via jetting port, in a direction away from the member, to be discharged from hole.

A waste sorting robot gripper comprises a suction cup engageable with the surface of a waste object. The suction cup has an air hole for evacuating air from the suction cup. A suction tube is coupled to the suction cup. The suction tube comprises a longitudinal axis. A first air inlet is in fluid communication with the air hole at one end of the suction tube and an air outlet at the other end of the suction tube. A path of the air flow between the air inlet and the air outlet is substantially along the longitudinal axis. The suction tube comprises a second air inlet in fluid communication with an air source, the second air inlet being between the first air inlet and the air outlet.

The present invention relates to a suction device, including a body. A cavity is disposed in the body. The cavity has a closed end face and an open end face. The open end face forms an end face to suck a workpiece. A tangential nozzle is disposed on a sidewall surface of the cavity. An external fluid enters the cavity through the tangential nozzle along a tangential direction of the cavity. A suction hole is disposed on the closed end face. The suction hole is connected to a suction unit. The suction unit sucks the fluid in the cavity through the suction hole. The suction device can suck a workpiece by using both a rotational flow negative pressure and a negative suction pressure of a fluid in the cavity, and therefore can suppress impact of a workpiece surface on a suction force and generate a larger suction force.

A substrate treating apparatus includes a carrier platform, a transport mechanism, and a controller. The carrier platform places a carrier thereon. The carrier includes a plurality of shelves arranged in an up-down direction. The shelves are each configured to place one substrate thereon in a horizontal posture. The transport mechanism is configured to transport a substrate to a carrier placed on the carrier platform. The controller controls the transport mechanism. The transport mechanism includes a hand and a hand driving unit. The hand supports a substrate. The hand driving unit moves the hand. The controller changes a height position of the hand when the hand is inserted between two of the shelves adjacent to each other in the up-down direction, depending on a shape of a substrate taken from or placed on one of the shelves by the transport mechanism.

Provided are a die pickup module and a die bonding apparatus including the same. The die pickup module includes a wafer stage for supporting a wafer including dies attached on a dicing tape, a die ejector arranged under the dicing tape and for separating a die to be picked up from the dicing tape, a non-contact picker for picking up the die in a non-contact manner so as not to contact a front surface of the die, a vertical driving unit for moving the non-contact picker in a vertical direction to pick up the die and an inverting driving unit for inverting the non-contact picker to invert a die picked up by the non-contact picker.

A waste sorting robot gripper comprises a suction cup engageable with the surface of a waste object. The suction cup has an air hole for evacuating air from the suction cup. A suction tube is coupled to the suction cup. The suction tube comprises a longitudinal axis. A first air inlet is in fluid communication with the air hole at one end of the suction tube and an air outlet at the other end of the suction tube. A path of the air flow between the air inlet and the air outlet is substantially along the longitudinal axis. The suction tube comprises a second air inlet in fluid communication with an air source, the second air inlet being between the first air inlet and the air outlet.

Material moving apparatus, systems and methods are presented which can include an air material mover. Airflow through orifices can create a localized vacuum such that the uppermost or top layer of material can be separated from the stack of material. The airflow can interact with the material to produce flutter, which assists in separating lower layers from the uppermost layer. A material gripper can grip the uppermost or top layer of material for removal from the stack and repositioning in a work area.