The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.

An O-ring and a conveyance apparatus are provided. The O-ring includes an O-ring body having an annular shape. The O-ring further includes a plurality of protrusions arranged at intervals on an outer annular surface of the O-ring body and configured to support a glass substrate and convey the glass substrate as the O-ring body rotates, so that a total area of contact between the glass substrate and the O-ring is reduced, thereby reducing a print area. In addition, after the protrusions and the glass substrate come into contact, contact marks are in a discontinuous state or, in other words, are in a spaced state, and prints are also discontinuous or spaced prints, thereby mitigating visual effects of the prints, and eliminating the prints at low costs.

A device for conveying and holding a sheet of glass includes a conveyor and a holder configured to hold a sheet of glass in position, in particular in a horizontal position. The holder includes at least two spaced-apart and parallel lateral conveying systems, and a multitude of spaced-apart wires extending transversely with respect to the lateral conveying systems and borne thereby, the sheet of glass being intended, via at least all or part of its lateral sides, to be pressed locally against the wires, and a delivery system configured to deliver pressurized water and/or air jets, the pressurized jets being intended to be sprayed toward the upper face of the sheet of glassthe opposite face to the one supported by the wires, so as to keep the sheet of glass pressed firmly against the wires.

A tray module capable of discharging static electricity to safely transfer display device members (e.g., components) includes: a tray configured to accommodate at least two members of a display device, at least two conductive protection films alternatingly stacked with the members of the display device, and a conductive pattern on the tray to provide a discharge path with the conductive protection films to ground.

Embodiments of the present disclosure provide a device and a method for detecting breakage of a substrate and a substrate transfer system. The device includes a first electrode and a second electrode arranged oppositely, a power source, and a detector. The power source may provide an alternating current voltage to the first electrode and the second electrode. The detector is arranged between the power source and the first electrode or the second electrode and may detect, when the substrate is placed between the first electrode and the second electrode, a current value in the substrate, and determine whether the substrate is damaged based on the detected current value.

A substrate inspection system includes a floating unit that floats a substrate, an inspection unit disposed above the floating unit, a grip unit disposed below the inspection unit and including a first grip member that holds the substrate on the floating unit, a grip transfer unit that moves the grip unit in a first direction, and an illumination unit that generates light. The inspection unit inspects the substrate that floats on the floating unit, the illumination unit is disposed on a moving path of the grip unit, and the light generated by the illumination unit is irradiated onto the inspection unit. The first grip member includes a first adsorption pad that adsorbs the substrate, and a first support member that supports the first adsorption pad and that includes a first opening into which the illumination unit is inserted.

A device for conveying and holding a sheet of glass, includes a conveyor and a holder configured to hold a sheet of glass in position, in particular in a horizontal position, wherein the conveyor comprises at least two spaced-apart and parallel lateral conveying systems extending longitudinally in the conveying direction and intended to be positioned in such a way as to support the lateral sides of the sheet of glass, and the holder comprises at least one holding system placed above the lateral conveying systems and above the sheet of glass and intended to limit the amplitude of the movements of the sheet of glass.

Apparatus and method for transferring a substrate are disclosed. The substrate transfer apparatus includes: a substrate conveyance assembly disposed between a mechanical arm and a wafer stage, the substrate conveyance assembly including a substrate loading conveyor and a substrate unloading conveyor parallelly arranged in a first direction, each of the substrate loading conveyor and the substrate unloading conveyor configured for transferring a substrate between the wafer stage and the mechanical arm along a second direction perpendicular to the first direction; an integral frame; and a transition air suspension assembly fixed to the integral frame at the end thereof proximal to the wafer stage, the transition air suspension assembly being able to engage with either of the substrate loading conveyor and the substrate unloading conveyor for producing an air film to levitate the substrate during the conveyance of the substrate by the substrate loading conveyor or the substrate unloading conveyor.

An apparatus for manufacturing a glass laminated substrate includes a chamber, a cutting apparatus configured to cut the glass laminated substrate within the chamber, and a surface processing apparatus configured to process a surface of the glass laminated substrate that is cut. The cutting apparatus and the surface processing apparatus of the apparatus for manufacturing a glass laminated substrate can be used to manufacture in-line the glass laminated substrate within the chamber.

To provide: a guide roller, whereby a replacement operation time can be shortened, guide roller position adjustment operations are not needed, and an equipment stop time can be reduced, and which contributes to suppression of productivity deterioration; and a substrate transfer apparatus provided with the guide roller. A substrate transfer apparatus (1) is provided with transfer rollers (3); a plurality of transfer shafts (2) that are provided with the transfer rollers (3); a guide roller (5) that guides a substrate (10); and a roller holding section (6) having a supporting shaft (62) that supports the guide roller (5) at one end. A contact section (52) of the guide roller (5) in contact with the substrate (10) can be separated from other sections (a base section (51) and a nut section (53)).