This disclosure describes techniques for fabricating a high-resolution, non-cytotoxic and transparent microfluidic device. A material can be selected based on having an optical property with a predetermined degree of transparency to provide viewability of a biological sample through the microfluidic device and a level of cytotoxicity within a predetermined threshold to provide viability of the biological sample within the microfluidic device. An additive manufacturing technique can be selected from a plurality of additive manufacturing techniques for fabricating the microfluidic device based on the selected material to provide a resolution of dimensions of one or more channels of the microfluidic device higher than a predetermined resolution threshold.

A microfluidic device comprising: a first substrate (402,502,602,702,802) having a first assembling side (402a,702a, 802a); and a second substrate (404,504,604,704,804) having a second assembling side (404a, 504a, 604a, 804a) connectable with the first assembling side (402a,702a, 802a) to assemble the first substrate (402,502,602,702,802) and the second substrate (404,504,604,704,804) together. At least one of the first assembling side (402a,702a, 802a) and the second assembling side (404a, 504a, 604a, 804a) has a fluid chamber channel (406,706,806), and after the first substrate (402,502,602,702,802) and the second substrate (404,504,604,704,804) are connected together, the fluid chamber channel (406,706,806) forms a fluid chamber having a fluid inlet (408,608,708,808) and a fluid outlet (410,510,610,710,810). The at least one of the first assembling side (402a,702a, 802a) and the second assembling side (404a, 504a, 604a, 804a) having the fluid chamber channel (406,706,806) has an outlet expansion groove (418,518,618,718,818, 818) adjacent to and extending downstream from the fluid outlet (410,510,610,710,810), and wherein at the fluid outlet (410,510,610,710,810), an outer peripheral profile of the outlet expansion groove (418,518,618,718,818, 818) is located outside an outer peripheral profile of the fluid outlet (410,510,610,710,810).

This disclosure describes techniques for fabricating a high-resolution, non-cytotoxic and transparent microfluidic device. A material can be selected based on having an optical property with a predetermined degree of transparency to provide viewability of a biological sample through the microfluidic device and a level of cytotoxicity within a predetermined threshold to provide viability of the biological sample within the microfluidic device. An additive manufacturing technique can be selected from a plurality of additive manufacturing techniques for fabricating the microfluidic device based on the selected material to provide a resolution of dimensions of one or more channels of the microfluidic device higher than a predetermined resolution threshold.

In an assembly between a MEMS and/or NEMS electromechanical component and a casing, the electromechanical component includes at least one suspended and movable structure which is provided with at least one fixing zone, on which a region for receiving the casing is fixed, the suspended structure being at least partially formed in a cover for protecting the component or in a layer which is different from the one in which a sensitive element of the component is formed.

The present disclosure discloses a method and apparatus for manufacturing a microfluidic chip with a femtosecond plasma grating. The method is characterized in that two or more beams of femtosecond pulse laser act on quartz glass together at a certain included angle and converge in the quartz glass, and when pulses achieve synchronization in time domain, the two optical pulses interfere; Benefited by constraint of an interference field, only one optical filament is formed in one interference period; and numbers of optical filaments are arranged equidistantly in space to form the plasma grating. The apparatus for manufacturing the microfluidic chip includes a plasma grating optical path, a microchannel processing platform, and a hydrofluoric acid ultrasonic cell.

A method for making three dimensional structures using photolithography and an adhesively bondable material is disclosed. A thiol-ene-epoxy (OSTE(−)) material undergoes a first reaction upon partial irradiation in a pattern to become a partially cross-linked polymer network. Non-cross-linked parts are dissolved in a solvent and removed. An initiator is added to activate the cross-linked polymer network so that it becomes adhesive and can then be covalently bound to another object to form an article. The method can be utilized to manufacture an article with a complicated three dimensional shape in an easy way.

A method of making a flowcell includes bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer, wherein the organic solid support includes a plurality of elongated cutouts. The method further includes bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer, so as to form the flowcell. The formed flowcell includes a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.

A method for fabricating a microfluidic device includes providing an assembly that includes a first silicon substrate having a hydrophilic silicon oxide top surface that includes a microfluidic channel and a second silicon substrate having a hydrophilic silicon oxide bottom surface directly bonded on the top surface of the first silicon substrate, the second silicon substrate including fluidic access holes giving fluidic access to the microfluidic channel. The method also includes exposing the assembly to oxidative species including one or more oxygen atoms and to heat so as to form silicon oxide at a surface of the access holes and of the microfluidic channel.

Examples include a fluidic die. The fluidic die comprises an array of field effect transistors including field effect transistors of a first size and field effect transistors of a second size. At least one connecting member interconnects at least some of the field effect transistors of the array of field effect transistors. The fluidic die further comprises a first fluid actuator connected to a first set of field effect transistors having at least one field effect transistor of the first size. The die includes a second fluid actuator connected to a second respective set of field effect transistors having a first respective field effect transistor of the second size interconnected to at least one other field effect transistor of the array.

A microfluidic chip with a high volumetric flow rate is provided that includes at least two vertically stacked microfluidic channel layers, each microfluidic channel layer including an array of spaced apart pillars. Each microfluidic channel layer is interconnected by an inlet/outlet opening that extends through the microfluidic chip. The microfluidic chip is created without wafer to wafer bonding thus circumventing the cost and yield issues associated with microfluidic chips that are created by wafer bonding.