Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
Load children
B81
MICROSTRUCTURAL TECHNOLOGY
Load children
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
Load children
1/00
Manufacture or treatment of devices or systems in or on a substrate
Load children Filter patents View analytics View as hierarchy
B81C1/00015
for manufacturing microsystems
Load children Filter patents View analytics View as hierarchy
B81C1/00261
Processes for packaging MEMS devices
Load children Filter patents View analytics View as hierarchy
B81C1/00277
for maintaining a controlled atmosphere inside of the cavity containing the MEMS
Load children Filter patents View analytics View as hierarchy
B81C1/00285
using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
Filter patents View analytics View as hierarchy