Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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2203/00
Forming microstructural systems
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B81C2203/07
Integrating an electronic processing unit with a micromechanical structure
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B81C2203/0707
Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure
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B81C2203/0757
Topology for facilitating the monolithic integration
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B81C2203/0771
Stacking the electronic processing unit and the micromechanical structure
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