A forming method includes atomizing a raw material solution to form a raw material mist, mixing raw material mist and carrier gas to form a gas mixture, placing substrate on a stage, forming a film on the substrate by supplying gas mixture to substrate from a gas mixture supply means, and exhausting gas mixture after the film formation by exhaust means, in which a channel plate is arranged above substrate and faces the substrate via a space, a gas mixture flow is formed in the space above the substrate flowing linearly from the gas mixture supply means to the exhaust means such that the gas mixture flow flows along at least a part of a main surface of the substrate, and in the forming step and the exhausting step, at least a temperature T1 of the gas mixture supply means, and a temperature T2 of the channel plate are controlled.

In an ultrasonic atomization apparatus being the present invention, a source solution is accommodated in a separator cup being a part of a container. A constituent material of the separator cup is PTFE being one of fluorocarbon resins, whose entire thickness is uniformly 0.5 mm. Therefore, the separator cup satisfies a thin film condition that “the thickness of a bottom surface BP1 is 0.5 mm or less”.

A mist inhaler device (200) for generating a mist comprising a therapeutic for inhalation by a user. The device comprises a mist generator device (201) and a driver device (202). The driver device (202) is configured to drive the mist generator device (201) at an optimum frequency to maximise the efficiency of mist generation by the mist generator device (201).

A hookah device (202) which attaches to a hookah (246). The hookah device (202) comprises a plurality of ultrasonic mist generator devices (201) for generating a mist for inhalation by a user. The hookah device (202) comprises a driver device (202) which controls the mist generator devices (201) to maximize the efficiency of mist generation by the mist generator devices (201) and optimize mist output from the hookah device (202).

In some embodiments according to the present disclosure, methods for mitigating particle retention are provided including the use of frequency sweep excitation to eject particle in the sweep. In some embodiments according to the present disclosure, the acoustically driven fluid ejector can be capable of being switched between multiple modes of operation. In other embodiments according to the present disclosure, the acoustically driven fluid ejector can be altered such that it includes the capability to be filled with a biocompatible material to aid in the mitigation of particle aggregation in the acoustically driven fluid ejector. In some embodiments according to the present disclosure, the solid structure and number of nozzles of the acoustically driven fluid ejector can be adjusted such that the ejector of the acoustically driven fluid ejector can be self-pumping, i.e. no external pumping mechanism other than acoustics driven flow drag is used.

An ultrasonic diffuser apparatus uses ultrasonic waves to aerosolize nano-emulsified cannabinoids into airborne nanoparticles. The apparatus includes at least: a base housing to house electronic components, a CBD storage compartment communicative with the base housing, and a cover removably mated with the CBD storage compartment. The cover includes an interior cavity and an exhaust outlet. The aerosolized CBD oil solution collects within the interior cavity and is expelled through the exhaust outlet where it is absorbed through the skin, mucus membranes and lungs of persons in a substantially closed room.

A variable-frequency surface acoustic wave electronic cigarette includes an atomizer. An atomization cavity is disposed in the atomizer, and a variable-frequency surface acoustic wave atomization chip is disposed at a lower portion of the atomization cavity. An inverted trapezoidal interdigital transducer is disposed on the variable-frequency surface acoustic wave atomization chip. An e-liquid storage cavity is disposed in the atomization cavity. A porous ceramic sheet is disposed between the e-liquid storage cavity and the atomization chip. The new variable-frequency surface acoustic wave electronic cigarette can realize any adjustment of the working frequency within a set range, thereby realizing the autonomous regulation and control of a smoke particle size after atomization of the e-liquid.

A dispenser and methods for transferring liquids are disclosed. The dispenser may include a capillary tube with tip having an aperture, a piezoelectric actuator coupled to the capillary tube at a location. Actuation of the piezoelectric actuator causes a pressure wave to propagate along the capillary tube toward the tip such that radial motion at the location is transmitted as distally extending axial motion of the tip, thereby causing a droplet of a predetermined volume to be ejected from the aperture. In some embodiments, the capillary tube has a modulus of elasticity in a range which dampens acoustical noise from the actuation and provides single drop stability over a range of drop sizes.

A nebulizer has an aperture plate, a mounting, an actuator, and an aperture plate drive circuit (2-4). A controller measures an electrical drive parameter at each of a plurality of measuring points, each measuring point having a drive frequency; and based on the values of the parameter at the measuring points makes a determination of optimum drive frequency and also an end-of-dose prediction. The controller performs a short scan at regular sub-second intervals at which drive current is measured at two measuring points with different drive frequencies. According to drive parameter measurements at these points the controller determines if a full scan sweeping across a larger number of measuring points should be performed. The full scan provides the optimum drive frequency for the device and also an end of dose indication.

Embodiments of the invention relate generally to disinfection and, more particularly, to methods, devices, and systems for disinfection of a space. In one embodiment, the invention provides a disinfecting system comprising: a disinfecting composition; and a device for producing a fog of the disinfecting composition, the fog comprising liquid droplets having diameters between about 0.5 micron and about 20 microns. In some embodiments, the invention includes a dehumidifying device for removing the fog of the disinfecting composition from the space.