A method for forming a semiconductor structure includes forming a conductive structure in a first dielectric layer, the conductive structure including an terminal portion and an extending portion, forming a second dielectric layer on the first dielectric layer, forming a first opening through the second dielectric layer directly above the extending portion and a second opening through the second dielectric layer directly above the terminal portion, a width of the second opening being smaller than 50% of a width of the first opening, forming a conductive material layer on the second dielectric layer and filling the first opening and the second opening, and performing a chemical mechanical polishing process to remove the conductive material layer outside the first opening and the second opening to obtain a conductive via in the first opening and a dummy via in the second opening.

A semiconductor structure includes a first dielectric layer on a substrate, a conductive structure disposed in the first dielectric layer and including a terminal portion and an extending portion directly and physically connected to the terminal portion and extending away from the terminal portion, a second dielectric layer disposed on the first dielectric layer, a conductive via through the second dielectric layer and directly contacting the extending portion, a dummy via through the second dielectric layer and directly contacting the terminal portion, wherein the dummy via comprises a lower portion consisting of a first filling layer and an upper portion consisting of a second filling layer, wherein the first filling layer and the second filling layer comprise different materials.

A device structure may be manufactured by forming metal interconnect structures embedded in dielectric material layers over a substrate; forming active metal connection structures, primary dummy metal structures, and miniature dummy metal structures over a topmost dielectric material layer selected from the dielectric material layers, wherein the miniature dummy metal structures have a lesser height than the active metal connection structures and the primary dummy metal structures; and forming bonding pads over the active metal connection structures, the primary dummy metal structures, and the miniature dummy metal structures, wherein the active metal connection structures and the primary dummy metal structures are contacted by the bonding pads, and the miniature dummy metal structures are not contacted by any of the bonding pads.

An apparatus that includes a first conductive pattern positioned at a first wiring layer and extending in a first direction, a second conductive pattern positioned at a second wiring layer located above the first wiring layer and extending in a second direction crossing the first direction, and a contact plug connecting the first conductive pattern with the second conductive pattern. The contact plug includes a lower conductive section contacting the first conductive pattern and an upper conductive section contacting the second conductive pattern. A maximum width of the upper conductive section in the first direction is smaller than a maximum width of the lower conductive section in the first direction.