A spray dryer arrangement comprising a spray dryer device (1), a heat pump (14) and a dehumidifier device (24), a primary liquid circuit (20) and a secondary liquid circuit (22). The spray dryer arrangement comprises a bypass conduit (66) provided in the secondary liquid circuit for bypassing a second heat exchanger (23), and a controllable valve (34) for controlling a flow of secondary liquid into the bypass conduit (66) and to the second heat exchanger (23) respectively, a temperature sensor (35) for measuring the temperature of the secondary liquid in the secondary liquid circuit (22), and a control unit (36) configured to control the controllable valve (34) on basis of input from the temperature sensor (35), and configured to thereby regulate the temperature of the secondary liquid in the secondary circuit (22) to be within a predetermined temperature range.

The present invention discloses a drying apparatus and method for drying a substrate using supercritical fluid. The drying apparatus comprises an upper chamber, a lower chamber, a substrate tray, a lifting mechanism, a connecting assembly and a locking mechanism. The lower chamber is disposed below the upper chamber. The substrate tray is disposed on the lower chamber and is used for carrying the substrate. The lifting mechanism is disposed below the lower chamber and is used for driving the lower chamber to move in the vertical direction, so that the lower chamber is completely contacted with the upper chamber. The connecting assembly is connected to the upper chamber and the lower chamber. The locking mechanism is used to lock or loosen the connecting assembly when the lower chamber is in full contact with the upper chamber. After the locking mechanism locks the connecting assembly and the lifting mechanism withdraws from the lower chamber, the locking mechanism and the connecting assembly automatically contact due to the action of gravity of the chamber, and the upper chamber and the lower chamber are closed to form a sealed chamber. The present invention has the advantage of enhancing the pressure resistance of the sealed chamber.

The present invention discloses a drying apparatus and method for drying a substrate using supercritical fluid. The drying apparatus comprises an upper chamber, a lower chamber, a substrate tray, a lifting mechanism, a connecting assembly and a locking mechanism. The lower chamber is disposed below the upper chamber. The substrate tray is disposed on the lower chamber and is used for carrying the substrate. The lifting mechanism is disposed below the lower chamber and is used for driving the lower chamber to move in the vertical direction, so that the lower chamber is completely contacted with the upper chamber. The connecting assembly is connected to the upper chamber and the lower chamber. The locking mechanism is used to lock or loosen the connecting assembly when the lower chamber is in full contact with the upper chamber. After the locking mechanism locks the connecting assembly and the lifting mechanism withdraws from the lower chamber, the locking mechanism and the connecting assembly automatically contact due to the action of gravity of the chamber, and the upper chamber and the lower chamber are closed to form a sealed chamber. The present invention has the advantage of enhancing the pressure resistance of the sealed chamber.