Embodiments of the disclosure are in the field of integrated circuit structure fabrication. In an example, an integrated circuit structure includes an inter-layer dielectric (ILD) layer over a conductive interconnect line, the ILD layer having a trench therein, the trench exposing a portion of the conductive interconnect line. A dielectric liner layer is along a top surface of the ILD layer and along sidewalls of the trench, the dielectric liner layer having an opening therein, the opening over the portion of the conductive interconnect line. A conductive via structure is in the trench and between portions of the dielectric liner layer along the sidewalls of the trench, the conductive via structure having a portion extending vertically beneath the dielectric liner layer and in contact with the portion of the conductive interconnect line.

A method of processing a substrate that includes: selectively depositing a self-assembled monolayer (SAM) on a metal line of the substrate, the SAM being in contact with the metal line, a surface of the substrate further including a first dielectric material that surrounds the metal line; selectively depositing a second dielectric material over the first dielectric material; forming a dielectric layer by depositing a third dielectric material over the second dielectric material and the SAM; and patterning the dielectric layer.

A conductor-filled via formed in a staircase structure that is provided in conjunction with a 3-dimensional array of memory strings, where the staircase structure includes multiple steps with each step including a bit line layer and a source line layer. The conductor-filled via includes a conductor to electrically connect a top layer in a first step in the staircase structure to a buried contact provided under the staircase structure, the top layer being the bit line layer or the source line layer of the first step; and a spacer insulator lining the sidewalls of the conductor-filled via to isolate the conductor from at least a bottom layer of the first step and the bit line layer or the source line layer in any steps between the first step and the buried contact.

Semiconductor devices and methods are disclosed, including memory cells/memory strings, semiconductor devices and systems. Example semiconductor devices and methods include a stack of alternating dielectric layers and conductor layers, and a vertical conductor passing between a top level of the stack and a bottom level of the stack. Lateral connections are included between a location along the vertical conductor and a selected conductor layer from the stack, wherein a direct interface is formed between the vertical conductor and the selected conductor layer.

Apparatus and methods are disclosed, including interconnection pathways, vias, memory cells, semiconductor devices and systems. Example semiconductor devices and methods include a conducting via passing between a top level of a stack and a bottom level of the stack. One or more isolation layers surround sides and a bottom of the conducting via. A lateral connection is shown between a location along the conducting via and a selected conductor layer from the stack, the lateral connection passing through the isolation layer.

A semiconductor device includes: an active pattern extending in a first direction and including a semiconductor material; a gate structure disposed on the active pattern, and extending in a second direction crossing the first direction; a plurality of channels spaced apart from each other in a third direction substantially perpendicular to the first and second directions; an etch stop pattern disposed on a lower surface of the gate structure; first and second source/drain layers disposed at opposite sides, respectively, of the gate structure, wherein each of the first and second source/drain layers contact the plurality of channels; a first contact plug disposed on an upper portion of the first source/drain layer; and a division structure extending through the active pattern and the etch stop pattern, wherein the division pattern is disposed on a lower surface of the gate structure.

A method for fabricating semiconductor device includes the steps of first providing a stack structure having a shallow trench isolation (STI) under a first substrate, a contact etch stop layer (CESL) under the STI, an interlayer dielectric (ILD) layer under the CESL, and a first metal interconnection under the ILD layer and then forming a second metal interconnection penetrating through the first substrate, the STI, the CESL, and the ILD layer to contact the first metal interconnection and a liner adjacent to a sidewall of the second metal interconnection.

Provided are an interconnection structure and a method of forming the same. The interconnection structure includes a substrate, including a lower voltage device region and a higher voltage device region; a first dielectric layer, located on the substrate in the lower voltage device region and the higher voltage device region; an under-layer interconnection structure, located in the first dielectric layer in the lower voltage device region and the higher voltage device region; a second dielectric layer, located on the first dielectric layer in the lower voltage device region and the higher voltage device region; a first via plug and a first metal layer, located in the second dielectric layer in the lower voltage device region; and a U-shaped high k (dielectric constant) layer and a second metal layer, located in the second dielectric layer in the higher voltage device region.

A method includes depositing an inter-metal dielectric (IMD) layer over a conductive line. A via opening is formed in the IMD layer and directly over the conductive line. A width of the conductive line is greater than a width of the via opening. An overlay measurement is performed. The overlay measurement includes obtaining a backscattered electron image of the via opening and the conductive line and determining an overlay between the via opening and the conductive line according to the backscattered electron image.

A semiconductor device includes gate electrodes stacked in a first direction and extending in a second direction, channel structures extending in the first direction into the gate electrodes, contact plugs extending in the first direction and electrically connected to the gate electrodes, respectively, and contact liner layers on side surfaces of the contact plugs, respectively. Portions of the contact plugs may extend into at least one of the gate electrodes. The contact liner layers may include a first contact liner layer on a side surface of a first contact plug and having a maximum thickness in the second direction as a first thickness, and a second contact liner layer on a side surface of a second contact plug and including a lower region having the first thickness and an upper region having a second thickness in the second direction that is greater than the first thickness.