Integrated circuit structures having anti-fuse structures, and methods of fabricating integrated circuit structures having anti-fuse structures, are described. For example, an integrated circuit structure includes a first vertical stack of horizontal nanowires. A first gate structure is over the first vertical stack of horizontal nanowires, the first gate structure including a first gate dielectric and a first gate electrode completely surrounding a channel region of each nanowire of the first vertical stack of horizontal nanowires. The integrated circuit structure also includes a second vertical stack of horizontal nanowires. A second gate structure is over the second vertical stack of horizontal nanowires, the second gate structure including a second gate dielectric and a second gate electrode only partially surrounding a channel region of each nanowire of the second vertical stack of horizontal nanowires.

A semiconductor structure with an acute angle includes a semiconductor substrate. A first isolation layer covers and contacts the semiconductor substrate. A first conductive element is disposed on the first isolation layer. The first conductive element includes a bottom surface and a sidewall. The bottom surface contacts the first isolation layer. An acute angle is formed between the bottom surface and the sidewall, and the acute angle has a tip. A second conductive element is disposed on one side of the first conductive element, wherein the tip pointing toward the second conductive element. An extension surface extends from the bottom surface of the first conductive element, and the extension surface intersects with the second conductive element. A second isolation layer sandwiched between the first conductive element and the second conductive element.

A non-volatile memory device includes a substrate, a stack structure that includes a first gate layer that extends in a horizontal direction and a second gate layer that extends in the horizontal direction and is disposed apart from the first gate layer in a vertical direction, a plurality of first channel structures that penetrate in the vertical direction through a first channel region of the stack structure, a plurality of second channel structures that penetrate in the vertical direction through a second channel region of the stack structure, a first anti-fuse structure and a second anti-fuse structure that each penetrate in the vertical direction through an anti-fuse region of the stack structure, a first anti-fuse transistor that is electrically connected to the first gate layer through the first anti-fuse structure, and a second anti-fuse transistor that is electrically connected to the second gate layer through the second anti-fuse structure.

An OTP memory device includes a substrate, a first transistor, a second transistor, a first word line, second word line, and a bit line. The first transistor includes a first gate structure, and first and second source/drain regions on opposite sides of the first gate structure. The second transistor is operable in an inversion mode, and the second transistor includes a second gate structure having more work function metal layers than the first gate structure of the first transistor, and second and third source/drain regions on opposite sides of the second gate structure. The first word line is over and electrically connected to the first gate structure of the first transistor. The second word line is over and electrically connected to the second gate structure of the second transistor. The bit line is over and electrically connected to the first source/drain region of the first transistor.

A 3D semiconductor device including: a first level including a first single crystal layer and first transistors, which each include a single crystal channel; a first metal layer with an overlaying second metal layer; a second level including second transistors, overlaying the first level; a third level including third transistors, overlaying the second level; a fourth level including fourth transistors, overlaying the third level, where the second level includes first memory cells, where each of the first memory cells includes at least one of the second transistors, where the fourth level includes second memory cells, where each of the second memory cells includes at least one of the fourth transistors, where the first level includes memory control circuits, where second memory cells include at least four memory arrays, each of the four memory arrays are independently controlled, and at least one of the second transistors includes a metal gate.

Disclosed is a memory cell including a dual-antifuse device between a first pass-gate transistor and a second pass-gate transistor. The dual-antifuse device includes first and second antifuses having a common terminal and each also having an additional terminal opposite the common terminal. The first pass-gate transistor is connected between a first bitline and the additional terminal of the first pass-gate transistor. The second pass-gate transistor is connected between a second bitline and the additional terminal of the second pass-gate transistor. The common terminal of the first and second antifuses and gates of the first and second pass-gate transistors are connected to a wordline. Also disclosed is a memory structure including an array of such memory cells and an associated operating method. Within the array, different wordline and bitline bias conditions can be employed in order to reliably perform programming or read operations of a selected antifuse in a selected cell.

An antifuse structure including a first metal line, a top via above and directly contacting the first metal line, a second metal line, and a conductive etch stop layer separating both the first metal line and the second metal line from an underlying layer, where a first portion of the conductive etch stop layer directly beneath the first metal line comprises a first extension region and a second portion of the conductive etch stop layer directly beneath the second metal line comprises a second extension region opposite the first extension region.

A method for fabricating a memory device is disclosed. The method includes forming a first transistor, and forming a first capacitor electrically coupled to the first transistor. The first transistor and the first capacitor form a first one-time-programmable (OTP) memory cell. The first capacitor is formed to have a first bottom metal terminal, a first top metal terminal, and a first insulation layer interposed therebetween. The first insulation layer is formed to include a first portion, a second portion separated from the first portion, and a third portion vertically extending therebetween. The first bottom metal terminal is formed directly below and in contact with the first portion of the first insulation layer.

The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate; a valley inwardly positioned on a top surface of the substrate; a programmable insulating layer conformally positioned on the valley and including a V-shaped cross-sectional profile; and a top electrode positioned on the programmable insulating layer. The programmable insulating layer is configured to be blown out under a programming voltage.

Methods of fabricating a 3D semiconductor device including: forming a first level including a first single crystal layer and first transistors, includes a single crystal channel; forming a first metal layer in the first level and a second metal layer overlaying the first metal layer; forming memory control circuits in the first level; forming a second level including second transistors, where at least one of the second transistors includes a metal gate; forming a third level including third transistors; forming a fourth level including fourth transistors, where the second level includes first memory cells, where the fourth level includes second memory cells, where the memory control circuits include control of data written into the first memory cells and into the second memory cells, where at least one of the transistors includes a hafnium oxide gate dielectric.