A package structure includes a circuit substrate, a semiconductor package, a first ring structure and a second ring structure. The semiconductor package is disposed on and electrically connected to the circuit substrate. The first ring structure is attached to the circuit substrate and surrounding the semiconductor package, wherein the first ring structure includes a central opening and a plurality of corner openings extending out from corners of the central opening, the semiconductor package is located in the central opening, and the plurality of corner openings is surrounding corners of the semiconductor package.

A method of manufacturing a display device includes forming a thin film transistor layer in an active area of a substrate, forming a metal layer on an edge area of the substrate, transferring first coating patterns to the edge area, the first coating patterns covering a portion of the metal layer corresponding to shapes of side surface lines, etching the metal layer to form the side surface lines, an upper surface of each of the side surface lines being covered by the first coating patterns, transferring a second coating pattern to the edge area, the second coating pattern covering a side surface of each of the side surface lines and the first coating patterns, and transferring light emitting elements to the thin film transistor layer. The second coating pattern includes openings corresponding to the first coating patterns in a plan view.

The semiconductor stacked package including a semiconductor die. The semiconductor die includes a substrate, a transistor, and a through-silicon-via (TSV) structure. The transistor is over the substrate. The TSV structure penetrates the substrate and comprises a first conductive layer, a second conductive layer, and a dielectric layer. The dielectric layer is between the first conductive layer and the second conductive layer. The method of manufacturing the same includes the following steps: forming a via hole in a substrate; forming a first conductive layer in the via hole; forming a dielectric layer in the via hole and over the first conductive layer; forming a second conductive layer in the via hole and over the dielectric layer; and forming a transistor over the substrate. The first conductive layer, the dielectric layer, and the second conductive layer collectively form a through-silicon-via (TSV) structure.

A semiconductor device including a redistribution substrate and a semiconductor chip on the redistribution substrate. The redistribution substrate includes an under-bump pad on a bottom surface of the redistribution substrate. The under-bump pad comprises a first pad part, a second pad part on the first pad part, and a via part that protrudes from the second pad part and contacts the first pad part. The first pad part has a first width in a first direction parallel to a top surface of the redistribution substrate. The second pad part has a second width in the first direction. The second width is greater than the first width.

A package comprising a first substrate; an integrated device coupled to the first substrate, wherein the integrated device comprises a plurality of back side metallization interconnects; and a second substrate coupled to the first substrate through a first plurality of solder interconnects, wherein the second substrate is coupled to the plurality of back side metallization interconnects through the second plurality of solder interconnects.

A package substrate according to the present disclosure includes a package substrate, an interposer disposed over the package substrate, a photonic die disposed over the interposer, a memory structure disposed over the interposer and including a controller die, a system die disposed over the interposer and partially overlapping with the photonic die and the controller die, and a lid covering the system die, the memory structure, and photonic die. The system die includes micro bumps extending from a bottom surface of the system die to a top surface of the controller die.

A semiconductor package comprises a first die having a central region and a peripheral region that surrounds the central region; a plurality of through electrodes that penetrate the first die; a plurality of first pads at a top surface of the first die and coupled to the through electrodes; a second die on the first die; a plurality of second pads at a bottom surface of the second die, the bottom surface of the second die facing the top surface of the first die; a plurality of connection terminals that connect the first pads to the second pads; and a dielectric layer that fills a space between the first die and the second die and surrounds the connection terminals. A first width of each of the first pads in the central region may be greater than a second width of each of the first pads in the peripheral region.

A method includes bonding a first plurality of device dies onto a wafer, wherein the wafer includes a second plurality of device dies, with each of the first plurality of device dies bonded to one of the second plurality of device dies. The wafer is then sawed to form a die stack, wherein the die stack includes a first device die from the first plurality of device dies and a second device die from the second plurality of device dies. The method further includes bonding the die stack over a package substrate.

A semiconductor package includes a redistribution layer including, a first insulating layer including a first trench, a first conductive layer including a first conductive region extending along a top surface of the first insulating layer and a second conductive region disposed inside the first trench, a second insulating layer on the first conductive layer and the first insulating layer, the second insulating layer including a second trench at least partially overlapping the first trench, the second trench exposing a part of the first conductive region and a second conductive layer including a third conductive region extending along a top surface of the second insulating layer and a fourth conductive region disposed on the second conductive region inside a via trench including sidewalls of the first trench and the second trench, and wherein the second and fourth conductive regions have a width in a range of 20 m to 600 m.

A manufacturing apparatus of a semiconductor device includes: a stage; a bonding head, including a mounting tool, a tool heater, and a lifting and lowering mechanism; and a controller performing bonding processing. The controller performs, in the bonding processing: first processing in which, after a chip is brought into contact with a substrate, as heating of the chip is started, the chip is pressurized against the substrate; distortion elimination processing in which, after the first processing and before melting of a bump, the lifting and lowering mechanism is driven in a lifting direction, thereby eliminating distortion of the bonding head; and second processing in which, after the distortion elimination processing, position control is performed on the lifting and lowering mechanism so as to cancel thermal expansion and contraction of the bonding head, thereby maintaining a gap amount at a specified target value.