A disclosed system is configured to bond a chip to a substrate and includes a chip processing subsystem that is configured to receive the chip and to expose the chip to a first plasma, and a substrate processing subsystem that is configured to receive the substrate and to expose the substrate to a second plasma. The system further includes a bonding subsystem that is configured to align the chip with the substrate, to force the chip and the substrate into direct mechanical contact with one another by application of a compressive force, and to apply heat to at least one of the chip or the substrate. Application of the compressive force and the heat thereby bonds the chip to the substrate. The first and second plasmas may include H.sub.2/N.sub.2, H.sub.2/Ar, H.sub.2/He, NH.sub.3/N.sub.2, NH.sub.3/Ar, or NH.sub.3/He and the chip and substrate may be maintained in a low oxygen environment.

Systems, devices, and methods for high die stack packages with vertical die-to-die interconnects are provided herein. A die stack package can include a substrate, a lower die stack carried by the substrate, a spacer carried by the substrate, an upper die stack carried by the spacer, a plurality of wire bonds, and a plurality of vertical wires. The lower die stack can include a plurality of lower dies stacked in a cascading arrangement. The upper die stack can include a plurality of upper dies stacked in a cascading arrangement in a same direction as the plurality of lower dies. The wire bonds can electrically couple adjacent ones of the lower dies. An nth vertical wire can extend vertically between and electrically couple an nth upper die and an nth lower die. In some embodiments, the die stack package further includes an input-and-output extender carried by the substrate.

A stacked package structure and a manufacturing method thereof are provided. The stacked package structure includes an upper redistribution layer, a first chip, and an upper molding layer. The first chip is disposed on the upper redistribution layer and is electrically connected to the upper redistribution layer. The upper molding layer is disposed on the first chip and the upper redistribution layer, and is configured to package the first chip. The upper molding layer includes a recess, the recess is recessed relative to a surface of the upper molding layer away from the upper redistribution layer, and the recess is circumferentially formed around a periphery of the upper molding layer.

A semiconductor module includes a first semiconductor chip including a first surface and a second surface parallel to a first direction and a second direction, a sub-semiconductor cube including a second semiconductor chip and a logic chip electrically connected to the second semiconductor chip stacked in the first direction, and a semiconductor cube arranged on the second surface, wherein the logic chip includes a plurality of first inductors arranged parallel to a third direction perpendicular to the first direction and the second direction, the first semiconductor chip includes a plurality of routers and a plurality of second inductors arranged parallel to the second surface, a plurality of circuits in the first semiconductor chip are electrically connected using the plurality of routers, and the logic chip and the first semiconductor chip are configured to be able to communicate contactlessly using the plurality of first inductors and the plurality of second inductors.