One aspect of the present disclosure pertains to a cassette carrier. The cassette carrier includes a frame defining an interior space having a top opening and a bottom opening, the frame having a first sidewall, a second sidewall, a first connecting wall, and a second connecting wall, where the first and second connecting walls extend between the first sidewall and the second sidewall. The cassette carrier includes a holder disposed across the bottom opening and laterally between the first and the second sidewall, where a through hole is formed in the holder, and an axis through the through hole passes through the top and the bottom openings.

A method for providing a substrate coating comprises transferring a substrate to an enclosed ink jet printing system; printing organic material in a deposition region of the substrate using the enclosed ink jet printing system, the deposition region comprising at least a portion of an active region of a light-emitting device on the substrate; loading the substrate with the organic material deposited thereon to an enclosed curing module; supporting the substrate in the enclosed curing module, the supporting the substrate comprising floating the substrate on a gas cushion established by a floatation support apparatus; and while supporting the substrate in the enclosed curing module, curing the organic material deposited on the substrate to form an organic film layer.

A front opening unified pod has a housing and a plurality of horizontal support members disposed within the housing and adapted to accommodate a plurality of semiconductor wafers or panels. The plurality of semiconductor wafers or panels have a different size or shape, such as circular and rectangular. A first one of the plurality of horizontal support members has a wing to support the plurality of different size or shape semiconductor wafers or panels. The plurality of horizontal support members has a first side horizontal support member, a second side horizontal support member, and a center horizontal support member disposed between the first side horizontal support member and the second side horizontal support member. The plurality of horizontal support members is insertable into the housing. One or more of the plurality of horizontal support members has an opening for laser identification.

A substrate storing container includes a lid body side substrate support portion. The lid body side substrate support portion has support flat surfaces respectively configured to contact with peripheral surfaces of the edge portions of the plurality of substrates so as to support the substrates, and the support flat surfaces that contact with the peripheral surfaces of the edge portions of adjacent ones of the plurality of substrates have overlap portions adjacent to each other in a direction parallel to upper surfaces of the substrates.

The rear retainer comprises: a rear-side substrate support portion which is disposed to be paired with the lid-side substrate support portion in the substrate housing space and is capable of supporting the edges of substrates, and which, when the container body opening portion is closed by the lid, cooperates with the lid-side substrate support portion to support the substrates with the edges of the substrates arranged in parallel; a protruding wall portion with an outer surface protruding toward the container body opening portion and an inner surface recessed toward the container body opening portion, the protruding wall portion having the rear-side substrate support portion provided on the protruding side of the protruding wall portion; and a circulation hole which, when the protruding side of the protruding wall portion is facing downward, allows circulation of a liquid and/or a gas that is positioned on the inner surface side of the protruding wall portion.